9/6/2011	6:33:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2011	6:33:07 PM	Recipe started at 6:33 PM
9/6/2011	6:33:07 PM	Helium valve closed
9/6/2011	6:33:07 PM	H2 valve closed
9/6/2011	6:33:07 PM	BCl3 valve closed
9/6/2011	6:33:07 PM	PH3 valve closed
9/6/2011	6:33:07 PM	SiCl4 pre valve closed
9/6/2011	6:33:07 PM	SiCl4 post valve closed
9/6/2011	6:33:07 PM	Main Vac valve closed
9/6/2011	6:33:07 PM	Bypass valve closed
9/6/2011	6:33:07 PM	Bubbler valve closed
9/6/2011	6:33:07 PM	Helium MFC set to  0.000000
9/6/2011	6:33:07 PM	H2 MFC set to  0.000000
9/6/2011	6:33:07 PM	BCl3 MFC set to  0.000000
9/6/2011	6:33:07 PM	PHl3 MFC set to  0.000000
9/6/2011	6:33:07 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:33:07 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:33:07 PM	Tube furnace set to 0
9/6/2011	6:33:10 PM	H2 valve closed
9/6/2011	6:33:10 PM	BCl3 valve closed
9/6/2011	6:33:10 PM	PH3 valve closed
9/6/2011	6:33:10 PM	SiCl4 pre valve closed
9/6/2011	6:33:10 PM	SiCl4 post valve closed
9/6/2011	6:33:10 PM	Main Vac valve closed
9/6/2011	6:33:10 PM	Bypass valve closed
9/6/2011	6:33:10 PM	Bubbler valve closed
9/6/2011	6:33:10 PM	Helium valve opened
9/6/2011	6:33:10 PM	Helium MFC set to  500.000000
9/6/2011	6:33:10 PM	H2 MFC set to  0.000000
9/6/2011	6:33:10 PM	BCl3 MFC set to  0.000000
9/6/2011	6:33:10 PM	PHl3 MFC set to  0.000000
9/6/2011	6:33:10 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:33:10 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:33:10 PM	Tube furnace set to 0
9/6/2011	6:34:15 PM	Helium valve closed
9/6/2011	6:34:15 PM	H2 valve closed
9/6/2011	6:34:15 PM	BCl3 valve closed
9/6/2011	6:34:15 PM	PH3 valve closed
9/6/2011	6:34:15 PM	SiCl4 pre valve closed
9/6/2011	6:34:15 PM	SiCl4 post valve closed
9/6/2011	6:34:15 PM	Main Vac valve closed
9/6/2011	6:34:15 PM	Bypass valve closed
9/6/2011	6:34:15 PM	Bubbler valve closed
9/6/2011	6:34:15 PM	Helium MFC set to  0.000000
9/6/2011	6:34:15 PM	H2 MFC set to  0.000000
9/6/2011	6:34:15 PM	BCl3 MFC set to  0.000000
9/6/2011	6:34:15 PM	PHl3 MFC set to  0.000000
9/6/2011	6:34:15 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:34:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:34:15 PM	Tube furnace set to 0
9/6/2011	6:34:16 PM	Run finished at 6:34 PM
9/6/2011	6:34:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2011	6:43:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	6:43:33 PM	Recipe started at 6:43 PM
9/6/2011	6:43:33 PM	Helium valve closed
9/6/2011	6:43:33 PM	H2 valve closed
9/6/2011	6:43:33 PM	BCl3 valve closed
9/6/2011	6:43:33 PM	PH3 valve closed
9/6/2011	6:43:33 PM	SiCl4 pre valve closed
9/6/2011	6:43:33 PM	SiCl4 post valve closed
9/6/2011	6:43:33 PM	Main Vac valve closed
9/6/2011	6:43:33 PM	Bubbler valve closed
9/6/2011	6:43:33 PM	Bypass valve opened
9/6/2011	6:43:33 PM	Helium MFC set to  0.000000
9/6/2011	6:43:33 PM	H2 MFC set to  0.000000
9/6/2011	6:43:33 PM	BCl3 MFC set to  0.000000
9/6/2011	6:43:33 PM	PHl3 MFC set to  0.000000
9/6/2011	6:43:33 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:43:33 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:43:33 PM	Tube furnace set to 0
9/6/2011	6:44:48 PM	Helium valve closed
9/6/2011	6:44:48 PM	H2 valve closed
9/6/2011	6:44:48 PM	BCl3 valve closed
9/6/2011	6:44:48 PM	PH3 valve closed
9/6/2011	6:44:48 PM	SiCl4 pre valve closed
9/6/2011	6:44:48 PM	SiCl4 post valve closed
9/6/2011	6:44:48 PM	Main Vac valve closed
9/6/2011	6:44:48 PM	Bubbler valve closed
9/6/2011	6:44:48 PM	Bypass valve opened
9/6/2011	6:44:48 PM	Helium MFC set to  0.000000
9/6/2011	6:44:48 PM	H2 MFC set to  0.000000
9/6/2011	6:44:48 PM	BCl3 MFC set to  0.000000
9/6/2011	6:44:48 PM	PHl3 MFC set to  0.000000
9/6/2011	6:44:48 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:44:48 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:44:49 PM	Tube furnace set to 0
9/6/2011	6:45:49 PM	Helium valve closed
9/6/2011	6:45:49 PM	H2 valve closed
9/6/2011	6:45:49 PM	BCl3 valve closed
9/6/2011	6:45:49 PM	PH3 valve closed
9/6/2011	6:45:49 PM	SiCl4 pre valve closed
9/6/2011	6:45:49 PM	SiCl4 post valve closed
9/6/2011	6:45:49 PM	Bypass valve closed
9/6/2011	6:45:49 PM	Bubbler valve closed
9/6/2011	6:45:49 PM	Main Vac valve opened
9/6/2011	6:45:49 PM	Helium MFC set to  0.000000
9/6/2011	6:45:49 PM	H2 MFC set to  0.000000
9/6/2011	6:45:49 PM	BCl3 MFC set to  0.000000
9/6/2011	6:45:49 PM	PHl3 MFC set to  0.000000
9/6/2011	6:45:49 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:45:49 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:45:49 PM	Tube furnace set to 0
9/6/2011	6:45:50 PM	Run finished at 6:45 PM
9/6/2011	6:45:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	6:46:52 PM	Recipe started at 6:46 PM
9/6/2011	6:46:52 PM	Helium valve closed
9/6/2011	6:46:52 PM	H2 valve closed
9/6/2011	6:46:52 PM	BCl3 valve closed
9/6/2011	6:46:52 PM	PH3 valve closed
9/6/2011	6:46:52 PM	SiCl4 pre valve closed
9/6/2011	6:46:52 PM	SiCl4 post valve closed
9/6/2011	6:46:52 PM	Bypass valve closed
9/6/2011	6:46:52 PM	Bubbler valve closed
9/6/2011	6:46:52 PM	Main Vac valve opened
9/6/2011	6:46:52 PM	Helium MFC set to  0.000000
9/6/2011	6:46:52 PM	H2 MFC set to  0.000000
9/6/2011	6:46:52 PM	BCl3 MFC set to  0.000000
9/6/2011	6:46:52 PM	PHl3 MFC set to  0.000000
9/6/2011	6:46:52 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:46:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:46:52 PM	Tube furnace set to 150
9/6/2011	6:47:22 PM	H2 valve closed
9/6/2011	6:47:22 PM	BCl3 valve closed
9/6/2011	6:47:22 PM	PH3 valve closed
9/6/2011	6:47:22 PM	SiCl4 pre valve closed
9/6/2011	6:47:22 PM	SiCl4 post valve closed
9/6/2011	6:47:22 PM	Bypass valve closed
9/6/2011	6:47:22 PM	Bubbler valve closed
9/6/2011	6:47:22 PM	Helium valve opened
9/6/2011	6:47:22 PM	Main Vac valve opened
9/6/2011	6:47:22 PM	Helium MFC set to  20.000000
9/6/2011	6:47:22 PM	H2 MFC set to  0.000000
9/6/2011	6:47:22 PM	BCl3 MFC set to  0.000000
9/6/2011	6:47:22 PM	PHl3 MFC set to  0.000000
9/6/2011	6:47:22 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:47:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:47:23 PM	Tube furnace set to 150
9/6/2011	6:47:53 PM	Helium valve closed
9/6/2011	6:47:53 PM	H2 valve closed
9/6/2011	6:47:53 PM	BCl3 valve closed
9/6/2011	6:47:53 PM	PH3 valve closed
9/6/2011	6:47:53 PM	SiCl4 pre valve closed
9/6/2011	6:47:53 PM	SiCl4 post valve closed
9/6/2011	6:47:53 PM	Bypass valve closed
9/6/2011	6:47:53 PM	Bubbler valve closed
9/6/2011	6:47:53 PM	Main Vac valve opened
9/6/2011	6:47:53 PM	Helium MFC set to  0.000000
9/6/2011	6:47:53 PM	H2 MFC set to  0.000000
9/6/2011	6:47:53 PM	BCl3 MFC set to  0.000000
9/6/2011	6:47:53 PM	PHl3 MFC set to  0.000000
9/6/2011	6:47:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:47:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:47:53 PM	Tube furnace set to 150
9/6/2011	6:48:23 PM	H2 valve closed
9/6/2011	6:48:23 PM	BCl3 valve closed
9/6/2011	6:48:23 PM	PH3 valve closed
9/6/2011	6:48:23 PM	SiCl4 pre valve closed
9/6/2011	6:48:23 PM	SiCl4 post valve closed
9/6/2011	6:48:23 PM	Bypass valve closed
9/6/2011	6:48:23 PM	Bubbler valve closed
9/6/2011	6:48:23 PM	Helium valve opened
9/6/2011	6:48:23 PM	Main Vac valve opened
9/6/2011	6:48:23 PM	Helium MFC set to  20.000000
9/6/2011	6:48:23 PM	H2 MFC set to  0.000000
9/6/2011	6:48:23 PM	BCl3 MFC set to  0.000000
9/6/2011	6:48:23 PM	PHl3 MFC set to  0.000000
9/6/2011	6:48:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:48:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:48:23 PM	Tube furnace set to 150
9/6/2011	6:48:53 PM	Helium valve closed
9/6/2011	6:48:53 PM	H2 valve closed
9/6/2011	6:48:53 PM	BCl3 valve closed
9/6/2011	6:48:53 PM	PH3 valve closed
9/6/2011	6:48:53 PM	SiCl4 pre valve closed
9/6/2011	6:48:53 PM	SiCl4 post valve closed
9/6/2011	6:48:53 PM	Bypass valve closed
9/6/2011	6:48:53 PM	Bubbler valve closed
9/6/2011	6:48:53 PM	Main Vac valve opened
9/6/2011	6:48:53 PM	Helium MFC set to  0.000000
9/6/2011	6:48:53 PM	H2 MFC set to  0.000000
9/6/2011	6:48:53 PM	BCl3 MFC set to  0.000000
9/6/2011	6:48:53 PM	PHl3 MFC set to  0.000000
9/6/2011	6:48:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:48:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:48:53 PM	Tube furnace set to 150
9/6/2011	6:49:23 PM	H2 valve closed
9/6/2011	6:49:23 PM	BCl3 valve closed
9/6/2011	6:49:23 PM	PH3 valve closed
9/6/2011	6:49:23 PM	SiCl4 pre valve closed
9/6/2011	6:49:23 PM	SiCl4 post valve closed
9/6/2011	6:49:23 PM	Bypass valve closed
9/6/2011	6:49:23 PM	Bubbler valve closed
9/6/2011	6:49:23 PM	Helium valve opened
9/6/2011	6:49:23 PM	Main Vac valve opened
9/6/2011	6:49:23 PM	Helium MFC set to  20.000000
9/6/2011	6:49:23 PM	H2 MFC set to  0.000000
9/6/2011	6:49:23 PM	BCl3 MFC set to  0.000000
9/6/2011	6:49:23 PM	PHl3 MFC set to  0.000000
9/6/2011	6:49:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:49:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:49:23 PM	Tube furnace set to 150
9/6/2011	6:49:53 PM	Helium valve closed
9/6/2011	6:49:53 PM	H2 valve closed
9/6/2011	6:49:53 PM	BCl3 valve closed
9/6/2011	6:49:53 PM	PH3 valve closed
9/6/2011	6:49:53 PM	SiCl4 pre valve closed
9/6/2011	6:49:53 PM	SiCl4 post valve closed
9/6/2011	6:49:53 PM	Bypass valve closed
9/6/2011	6:49:53 PM	Bubbler valve closed
9/6/2011	6:49:53 PM	Main Vac valve opened
9/6/2011	6:49:53 PM	Helium MFC set to  0.000000
9/6/2011	6:49:53 PM	H2 MFC set to  0.000000
9/6/2011	6:49:53 PM	BCl3 MFC set to  0.000000
9/6/2011	6:49:53 PM	PHl3 MFC set to  0.000000
9/6/2011	6:49:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:49:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:49:54 PM	Tube furnace set to 150
9/6/2011	6:50:24 PM	H2 valve closed
9/6/2011	6:50:24 PM	BCl3 valve closed
9/6/2011	6:50:24 PM	PH3 valve closed
9/6/2011	6:50:24 PM	SiCl4 pre valve closed
9/6/2011	6:50:24 PM	SiCl4 post valve closed
9/6/2011	6:50:24 PM	Bypass valve closed
9/6/2011	6:50:24 PM	Bubbler valve closed
9/6/2011	6:50:24 PM	Helium valve opened
9/6/2011	6:50:24 PM	Main Vac valve opened
9/6/2011	6:50:24 PM	Helium MFC set to  20.000000
9/6/2011	6:50:24 PM	H2 MFC set to  0.000000
9/6/2011	6:50:24 PM	BCl3 MFC set to  0.000000
9/6/2011	6:50:24 PM	PHl3 MFC set to  0.000000
9/6/2011	6:50:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:50:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:50:24 PM	Tube furnace set to 150
9/6/2011	6:50:54 PM	Helium valve closed
9/6/2011	6:50:54 PM	H2 valve closed
9/6/2011	6:50:54 PM	BCl3 valve closed
9/6/2011	6:50:54 PM	PH3 valve closed
9/6/2011	6:50:54 PM	SiCl4 pre valve closed
9/6/2011	6:50:54 PM	SiCl4 post valve closed
9/6/2011	6:50:54 PM	Bypass valve closed
9/6/2011	6:50:54 PM	Bubbler valve closed
9/6/2011	6:50:54 PM	Main Vac valve opened
9/6/2011	6:50:54 PM	Helium MFC set to  0.000000
9/6/2011	6:50:54 PM	H2 MFC set to  0.000000
9/6/2011	6:50:54 PM	BCl3 MFC set to  0.000000
9/6/2011	6:50:54 PM	PHl3 MFC set to  0.000000
9/6/2011	6:50:54 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:50:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:50:54 PM	Tube furnace set to 150
9/6/2011	6:51:24 PM	H2 valve closed
9/6/2011	6:51:24 PM	BCl3 valve closed
9/6/2011	6:51:24 PM	PH3 valve closed
9/6/2011	6:51:24 PM	SiCl4 pre valve closed
9/6/2011	6:51:24 PM	SiCl4 post valve closed
9/6/2011	6:51:24 PM	Bypass valve closed
9/6/2011	6:51:24 PM	Bubbler valve closed
9/6/2011	6:51:24 PM	Helium valve opened
9/6/2011	6:51:24 PM	Main Vac valve opened
9/6/2011	6:51:24 PM	Helium MFC set to  20.000000
9/6/2011	6:51:24 PM	H2 MFC set to  0.000000
9/6/2011	6:51:24 PM	BCl3 MFC set to  0.000000
9/6/2011	6:51:24 PM	PHl3 MFC set to  0.000000
9/6/2011	6:51:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:51:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:51:24 PM	Tube furnace set to 150
9/6/2011	6:51:54 PM	Helium valve closed
9/6/2011	6:51:54 PM	H2 valve closed
9/6/2011	6:51:54 PM	BCl3 valve closed
9/6/2011	6:51:54 PM	PH3 valve closed
9/6/2011	6:51:54 PM	SiCl4 pre valve closed
9/6/2011	6:51:54 PM	SiCl4 post valve closed
9/6/2011	6:51:54 PM	Bypass valve closed
9/6/2011	6:51:54 PM	Bubbler valve closed
9/6/2011	6:51:54 PM	Main Vac valve opened
9/6/2011	6:51:54 PM	Helium MFC set to  0.000000
9/6/2011	6:51:54 PM	H2 MFC set to  0.000000
9/6/2011	6:51:54 PM	BCl3 MFC set to  0.000000
9/6/2011	6:51:54 PM	PHl3 MFC set to  0.000000
9/6/2011	6:51:54 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:51:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:51:54 PM	Tube furnace set to 150
9/6/2011	6:52:24 PM	H2 valve closed
9/6/2011	6:52:24 PM	BCl3 valve closed
9/6/2011	6:52:24 PM	PH3 valve closed
9/6/2011	6:52:24 PM	SiCl4 pre valve closed
9/6/2011	6:52:24 PM	SiCl4 post valve closed
9/6/2011	6:52:24 PM	Bypass valve closed
9/6/2011	6:52:24 PM	Bubbler valve closed
9/6/2011	6:52:24 PM	Helium valve opened
9/6/2011	6:52:24 PM	Main Vac valve opened
9/6/2011	6:52:24 PM	Helium MFC set to  20.000000
9/6/2011	6:52:24 PM	H2 MFC set to  0.000000
9/6/2011	6:52:24 PM	BCl3 MFC set to  0.000000
9/6/2011	6:52:24 PM	PHl3 MFC set to  0.000000
9/6/2011	6:52:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:52:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:52:25 PM	Tube furnace set to 150
9/6/2011	6:52:55 PM	Helium valve closed
9/6/2011	6:52:55 PM	H2 valve closed
9/6/2011	6:52:55 PM	BCl3 valve closed
9/6/2011	6:52:55 PM	PH3 valve closed
9/6/2011	6:52:55 PM	SiCl4 pre valve closed
9/6/2011	6:52:55 PM	SiCl4 post valve closed
9/6/2011	6:52:55 PM	Bypass valve closed
9/6/2011	6:52:55 PM	Bubbler valve closed
9/6/2011	6:52:55 PM	Main Vac valve opened
9/6/2011	6:52:55 PM	Helium MFC set to  0.000000
9/6/2011	6:52:55 PM	H2 MFC set to  0.000000
9/6/2011	6:52:55 PM	BCl3 MFC set to  0.000000
9/6/2011	6:52:55 PM	PHl3 MFC set to  0.000000
9/6/2011	6:52:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:52:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:52:55 PM	Tube furnace set to 150
9/6/2011	6:53:25 PM	H2 valve closed
9/6/2011	6:53:25 PM	BCl3 valve closed
9/6/2011	6:53:25 PM	PH3 valve closed
9/6/2011	6:53:25 PM	SiCl4 pre valve closed
9/6/2011	6:53:25 PM	SiCl4 post valve closed
9/6/2011	6:53:25 PM	Bypass valve closed
9/6/2011	6:53:25 PM	Bubbler valve closed
9/6/2011	6:53:25 PM	Helium valve opened
9/6/2011	6:53:25 PM	Main Vac valve opened
9/6/2011	6:53:25 PM	Helium MFC set to  20.000000
9/6/2011	6:53:25 PM	H2 MFC set to  0.000000
9/6/2011	6:53:25 PM	BCl3 MFC set to  0.000000
9/6/2011	6:53:25 PM	PHl3 MFC set to  0.000000
9/6/2011	6:53:25 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:53:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:53:25 PM	Tube furnace set to 150
9/6/2011	6:53:55 PM	Helium valve closed
9/6/2011	6:53:55 PM	H2 valve closed
9/6/2011	6:53:55 PM	BCl3 valve closed
9/6/2011	6:53:55 PM	PH3 valve closed
9/6/2011	6:53:55 PM	SiCl4 pre valve closed
9/6/2011	6:53:55 PM	SiCl4 post valve closed
9/6/2011	6:53:55 PM	Bypass valve closed
9/6/2011	6:53:55 PM	Bubbler valve closed
9/6/2011	6:53:55 PM	Main Vac valve opened
9/6/2011	6:53:55 PM	Helium MFC set to  0.000000
9/6/2011	6:53:55 PM	H2 MFC set to  0.000000
9/6/2011	6:53:55 PM	BCl3 MFC set to  0.000000
9/6/2011	6:53:55 PM	PHl3 MFC set to  0.000000
9/6/2011	6:53:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:53:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:53:55 PM	Tube furnace set to 150
9/6/2011	6:54:25 PM	H2 valve closed
9/6/2011	6:54:25 PM	BCl3 valve closed
9/6/2011	6:54:25 PM	PH3 valve closed
9/6/2011	6:54:25 PM	SiCl4 pre valve closed
9/6/2011	6:54:25 PM	SiCl4 post valve closed
9/6/2011	6:54:25 PM	Bypass valve closed
9/6/2011	6:54:25 PM	Bubbler valve closed
9/6/2011	6:54:25 PM	Helium valve opened
9/6/2011	6:54:25 PM	Main Vac valve opened
9/6/2011	6:54:25 PM	Helium MFC set to  20.000000
9/6/2011	6:54:25 PM	H2 MFC set to  0.000000
9/6/2011	6:54:25 PM	BCl3 MFC set to  0.000000
9/6/2011	6:54:25 PM	PHl3 MFC set to  0.000000
9/6/2011	6:54:25 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:54:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:54:25 PM	Tube furnace set to 150
9/6/2011	6:54:55 PM	Helium valve closed
9/6/2011	6:54:55 PM	H2 valve closed
9/6/2011	6:54:55 PM	BCl3 valve closed
9/6/2011	6:54:55 PM	PH3 valve closed
9/6/2011	6:54:55 PM	SiCl4 pre valve closed
9/6/2011	6:54:55 PM	SiCl4 post valve closed
9/6/2011	6:54:55 PM	Bypass valve closed
9/6/2011	6:54:55 PM	Bubbler valve closed
9/6/2011	6:54:55 PM	Main Vac valve opened
9/6/2011	6:54:55 PM	Helium MFC set to  0.000000
9/6/2011	6:54:55 PM	H2 MFC set to  0.000000
9/6/2011	6:54:55 PM	BCl3 MFC set to  0.000000
9/6/2011	6:54:55 PM	PHl3 MFC set to  0.000000
9/6/2011	6:54:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:54:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:54:56 PM	Tube furnace set to 150
9/6/2011	6:55:26 PM	H2 valve closed
9/6/2011	6:55:26 PM	BCl3 valve closed
9/6/2011	6:55:26 PM	PH3 valve closed
9/6/2011	6:55:26 PM	SiCl4 pre valve closed
9/6/2011	6:55:26 PM	SiCl4 post valve closed
9/6/2011	6:55:26 PM	Bypass valve closed
9/6/2011	6:55:26 PM	Bubbler valve closed
9/6/2011	6:55:26 PM	Helium valve opened
9/6/2011	6:55:26 PM	Main Vac valve opened
9/6/2011	6:55:26 PM	Helium MFC set to  20.000000
9/6/2011	6:55:26 PM	H2 MFC set to  0.000000
9/6/2011	6:55:26 PM	BCl3 MFC set to  0.000000
9/6/2011	6:55:26 PM	PHl3 MFC set to  0.000000
9/6/2011	6:55:26 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:55:26 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:55:26 PM	Tube furnace set to 150
9/6/2011	6:55:56 PM	Helium valve closed
9/6/2011	6:55:56 PM	H2 valve closed
9/6/2011	6:55:56 PM	BCl3 valve closed
9/6/2011	6:55:56 PM	PH3 valve closed
9/6/2011	6:55:56 PM	SiCl4 pre valve closed
9/6/2011	6:55:56 PM	SiCl4 post valve closed
9/6/2011	6:55:56 PM	Bypass valve closed
9/6/2011	6:55:56 PM	Bubbler valve closed
9/6/2011	6:55:56 PM	Main Vac valve opened
9/6/2011	6:55:56 PM	Helium MFC set to  0.000000
9/6/2011	6:55:56 PM	H2 MFC set to  0.000000
9/6/2011	6:55:56 PM	BCl3 MFC set to  0.000000
9/6/2011	6:55:56 PM	PHl3 MFC set to  0.000000
9/6/2011	6:55:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:55:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:55:56 PM	Tube furnace set to 150
9/6/2011	6:56:26 PM	H2 valve closed
9/6/2011	6:56:26 PM	BCl3 valve closed
9/6/2011	6:56:26 PM	PH3 valve closed
9/6/2011	6:56:26 PM	SiCl4 pre valve closed
9/6/2011	6:56:26 PM	SiCl4 post valve closed
9/6/2011	6:56:26 PM	Bypass valve closed
9/6/2011	6:56:26 PM	Bubbler valve closed
9/6/2011	6:56:26 PM	Helium valve opened
9/6/2011	6:56:26 PM	Main Vac valve opened
9/6/2011	6:56:26 PM	Helium MFC set to  20.000000
9/6/2011	6:56:26 PM	H2 MFC set to  0.000000
9/6/2011	6:56:26 PM	BCl3 MFC set to  0.000000
9/6/2011	6:56:26 PM	PHl3 MFC set to  0.000000
9/6/2011	6:56:26 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:56:26 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:56:26 PM	Tube furnace set to 150
9/6/2011	6:56:56 PM	Helium valve closed
9/6/2011	6:56:56 PM	H2 valve closed
9/6/2011	6:56:56 PM	BCl3 valve closed
9/6/2011	6:56:56 PM	PH3 valve closed
9/6/2011	6:56:56 PM	SiCl4 pre valve closed
9/6/2011	6:56:56 PM	SiCl4 post valve closed
9/6/2011	6:56:56 PM	Bypass valve closed
9/6/2011	6:56:56 PM	Bubbler valve closed
9/6/2011	6:56:56 PM	Main Vac valve opened
9/6/2011	6:56:56 PM	Helium MFC set to  0.000000
9/6/2011	6:56:56 PM	H2 MFC set to  0.000000
9/6/2011	6:56:56 PM	BCl3 MFC set to  0.000000
9/6/2011	6:56:56 PM	PHl3 MFC set to  0.000000
9/6/2011	6:56:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	6:56:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	6:56:57 PM	Tube furnace set to 150
9/6/2011	6:56:58 PM	Run finished at 6:56 PM
9/6/2011	7:14:41 PM	Recipe started at 7:14 PM
9/6/2011	7:14:41 PM	Helium valve closed
9/6/2011	7:14:41 PM	H2 valve closed
9/6/2011	7:14:41 PM	BCl3 valve closed
9/6/2011	7:14:41 PM	PH3 valve closed
9/6/2011	7:14:41 PM	SiCl4 pre valve closed
9/6/2011	7:14:41 PM	SiCl4 post valve closed
9/6/2011	7:14:41 PM	Bypass valve closed
9/6/2011	7:14:41 PM	Bubbler valve closed
9/6/2011	7:14:41 PM	Main Vac valve opened
9/6/2011	7:14:41 PM	Helium MFC set to  0.000000
9/6/2011	7:14:41 PM	H2 MFC set to  0.000000
9/6/2011	7:14:41 PM	BCl3 MFC set to  0.000000
9/6/2011	7:14:41 PM	PHl3 MFC set to  0.000000
9/6/2011	7:14:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:14:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:14:42 PM	Tube furnace set to 150
9/6/2011	7:15:12 PM	H2 valve closed
9/6/2011	7:15:12 PM	BCl3 valve closed
9/6/2011	7:15:12 PM	PH3 valve closed
9/6/2011	7:15:12 PM	SiCl4 pre valve closed
9/6/2011	7:15:12 PM	SiCl4 post valve closed
9/6/2011	7:15:12 PM	Bypass valve closed
9/6/2011	7:15:12 PM	Bubbler valve closed
9/6/2011	7:15:12 PM	Helium valve opened
9/6/2011	7:15:12 PM	Main Vac valve opened
9/6/2011	7:15:12 PM	Helium MFC set to  20.000000
9/6/2011	7:15:12 PM	H2 MFC set to  0.000000
9/6/2011	7:15:12 PM	BCl3 MFC set to  0.000000
9/6/2011	7:15:12 PM	PHl3 MFC set to  0.000000
9/6/2011	7:15:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:15:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:15:12 PM	Tube furnace set to 150
9/6/2011	7:15:42 PM	Helium valve closed
9/6/2011	7:15:42 PM	H2 valve closed
9/6/2011	7:15:42 PM	BCl3 valve closed
9/6/2011	7:15:42 PM	PH3 valve closed
9/6/2011	7:15:42 PM	SiCl4 pre valve closed
9/6/2011	7:15:42 PM	SiCl4 post valve closed
9/6/2011	7:15:42 PM	Bypass valve closed
9/6/2011	7:15:42 PM	Bubbler valve closed
9/6/2011	7:15:42 PM	Main Vac valve opened
9/6/2011	7:15:42 PM	Helium MFC set to  0.000000
9/6/2011	7:15:42 PM	H2 MFC set to  0.000000
9/6/2011	7:15:42 PM	BCl3 MFC set to  0.000000
9/6/2011	7:15:42 PM	PHl3 MFC set to  0.000000
9/6/2011	7:15:42 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:15:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:15:42 PM	Tube furnace set to 150
9/6/2011	7:16:12 PM	H2 valve closed
9/6/2011	7:16:12 PM	BCl3 valve closed
9/6/2011	7:16:12 PM	PH3 valve closed
9/6/2011	7:16:12 PM	SiCl4 pre valve closed
9/6/2011	7:16:12 PM	SiCl4 post valve closed
9/6/2011	7:16:12 PM	Bypass valve closed
9/6/2011	7:16:12 PM	Bubbler valve closed
9/6/2011	7:16:12 PM	Helium valve opened
9/6/2011	7:16:12 PM	Main Vac valve opened
9/6/2011	7:16:12 PM	Helium MFC set to  20.000000
9/6/2011	7:16:12 PM	H2 MFC set to  0.000000
9/6/2011	7:16:12 PM	BCl3 MFC set to  0.000000
9/6/2011	7:16:12 PM	PHl3 MFC set to  0.000000
9/6/2011	7:16:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:16:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:16:12 PM	Tube furnace set to 150
9/6/2011	7:16:42 PM	Helium valve closed
9/6/2011	7:16:42 PM	H2 valve closed
9/6/2011	7:16:42 PM	BCl3 valve closed
9/6/2011	7:16:42 PM	PH3 valve closed
9/6/2011	7:16:42 PM	SiCl4 pre valve closed
9/6/2011	7:16:42 PM	SiCl4 post valve closed
9/6/2011	7:16:42 PM	Bypass valve closed
9/6/2011	7:16:42 PM	Bubbler valve closed
9/6/2011	7:16:42 PM	Main Vac valve opened
9/6/2011	7:16:42 PM	Helium MFC set to  0.000000
9/6/2011	7:16:42 PM	H2 MFC set to  0.000000
9/6/2011	7:16:42 PM	BCl3 MFC set to  0.000000
9/6/2011	7:16:42 PM	PHl3 MFC set to  0.000000
9/6/2011	7:16:42 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:16:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:16:42 PM	Tube furnace set to 150
9/6/2011	7:17:12 PM	H2 valve closed
9/6/2011	7:17:12 PM	BCl3 valve closed
9/6/2011	7:17:12 PM	PH3 valve closed
9/6/2011	7:17:12 PM	SiCl4 pre valve closed
9/6/2011	7:17:12 PM	SiCl4 post valve closed
9/6/2011	7:17:12 PM	Bypass valve closed
9/6/2011	7:17:12 PM	Bubbler valve closed
9/6/2011	7:17:12 PM	Helium valve opened
9/6/2011	7:17:12 PM	Main Vac valve opened
9/6/2011	7:17:12 PM	Helium MFC set to  20.000000
9/6/2011	7:17:12 PM	H2 MFC set to  0.000000
9/6/2011	7:17:12 PM	BCl3 MFC set to  0.000000
9/6/2011	7:17:12 PM	PHl3 MFC set to  0.000000
9/6/2011	7:17:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:17:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:17:13 PM	Tube furnace set to 150
9/6/2011	7:17:43 PM	Helium valve closed
9/6/2011	7:17:43 PM	H2 valve closed
9/6/2011	7:17:43 PM	BCl3 valve closed
9/6/2011	7:17:43 PM	PH3 valve closed
9/6/2011	7:17:43 PM	SiCl4 pre valve closed
9/6/2011	7:17:43 PM	SiCl4 post valve closed
9/6/2011	7:17:43 PM	Bypass valve closed
9/6/2011	7:17:43 PM	Bubbler valve closed
9/6/2011	7:17:43 PM	Main Vac valve opened
9/6/2011	7:17:43 PM	Helium MFC set to  0.000000
9/6/2011	7:17:43 PM	H2 MFC set to  0.000000
9/6/2011	7:17:43 PM	BCl3 MFC set to  0.000000
9/6/2011	7:17:43 PM	PHl3 MFC set to  0.000000
9/6/2011	7:17:43 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:17:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:17:43 PM	Tube furnace set to 150
9/6/2011	7:18:13 PM	H2 valve closed
9/6/2011	7:18:13 PM	BCl3 valve closed
9/6/2011	7:18:13 PM	PH3 valve closed
9/6/2011	7:18:13 PM	SiCl4 pre valve closed
9/6/2011	7:18:13 PM	SiCl4 post valve closed
9/6/2011	7:18:13 PM	Bypass valve closed
9/6/2011	7:18:13 PM	Bubbler valve closed
9/6/2011	7:18:13 PM	Helium valve opened
9/6/2011	7:18:13 PM	Main Vac valve opened
9/6/2011	7:18:13 PM	Helium MFC set to  20.000000
9/6/2011	7:18:13 PM	H2 MFC set to  0.000000
9/6/2011	7:18:13 PM	BCl3 MFC set to  0.000000
9/6/2011	7:18:13 PM	PHl3 MFC set to  0.000000
9/6/2011	7:18:13 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:18:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:18:13 PM	Tube furnace set to 150
9/6/2011	7:18:43 PM	Helium valve closed
9/6/2011	7:18:43 PM	H2 valve closed
9/6/2011	7:18:43 PM	BCl3 valve closed
9/6/2011	7:18:43 PM	PH3 valve closed
9/6/2011	7:18:43 PM	SiCl4 pre valve closed
9/6/2011	7:18:43 PM	SiCl4 post valve closed
9/6/2011	7:18:43 PM	Bypass valve closed
9/6/2011	7:18:43 PM	Bubbler valve closed
9/6/2011	7:18:43 PM	Main Vac valve opened
9/6/2011	7:18:43 PM	Helium MFC set to  0.000000
9/6/2011	7:18:43 PM	H2 MFC set to  0.000000
9/6/2011	7:18:43 PM	BCl3 MFC set to  0.000000
9/6/2011	7:18:43 PM	PHl3 MFC set to  0.000000
9/6/2011	7:18:43 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:18:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:18:43 PM	Tube furnace set to 150
9/6/2011	7:19:13 PM	H2 valve closed
9/6/2011	7:19:13 PM	BCl3 valve closed
9/6/2011	7:19:13 PM	PH3 valve closed
9/6/2011	7:19:13 PM	SiCl4 pre valve closed
9/6/2011	7:19:13 PM	SiCl4 post valve closed
9/6/2011	7:19:13 PM	Bypass valve closed
9/6/2011	7:19:13 PM	Bubbler valve closed
9/6/2011	7:19:13 PM	Helium valve opened
9/6/2011	7:19:13 PM	Main Vac valve opened
9/6/2011	7:19:13 PM	Helium MFC set to  20.000000
9/6/2011	7:19:13 PM	H2 MFC set to  0.000000
9/6/2011	7:19:13 PM	BCl3 MFC set to  0.000000
9/6/2011	7:19:13 PM	PHl3 MFC set to  0.000000
9/6/2011	7:19:13 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:19:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:19:13 PM	Tube furnace set to 150
9/6/2011	7:19:43 PM	Helium valve closed
9/6/2011	7:19:43 PM	H2 valve closed
9/6/2011	7:19:43 PM	BCl3 valve closed
9/6/2011	7:19:43 PM	PH3 valve closed
9/6/2011	7:19:43 PM	SiCl4 pre valve closed
9/6/2011	7:19:43 PM	SiCl4 post valve closed
9/6/2011	7:19:43 PM	Bypass valve closed
9/6/2011	7:19:43 PM	Bubbler valve closed
9/6/2011	7:19:44 PM	Main Vac valve opened
9/6/2011	7:19:44 PM	Helium MFC set to  0.000000
9/6/2011	7:19:44 PM	H2 MFC set to  0.000000
9/6/2011	7:19:44 PM	BCl3 MFC set to  0.000000
9/6/2011	7:19:44 PM	PHl3 MFC set to  0.000000
9/6/2011	7:19:44 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:19:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:19:44 PM	Tube furnace set to 150
9/6/2011	7:20:14 PM	H2 valve closed
9/6/2011	7:20:14 PM	BCl3 valve closed
9/6/2011	7:20:14 PM	PH3 valve closed
9/6/2011	7:20:14 PM	SiCl4 pre valve closed
9/6/2011	7:20:14 PM	SiCl4 post valve closed
9/6/2011	7:20:14 PM	Bypass valve closed
9/6/2011	7:20:14 PM	Bubbler valve closed
9/6/2011	7:20:14 PM	Helium valve opened
9/6/2011	7:20:14 PM	Main Vac valve opened
9/6/2011	7:20:14 PM	Helium MFC set to  20.000000
9/6/2011	7:20:14 PM	H2 MFC set to  0.000000
9/6/2011	7:20:14 PM	BCl3 MFC set to  0.000000
9/6/2011	7:20:14 PM	PHl3 MFC set to  0.000000
9/6/2011	7:20:14 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:20:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:20:14 PM	Tube furnace set to 150
9/6/2011	7:20:44 PM	Helium valve closed
9/6/2011	7:20:44 PM	H2 valve closed
9/6/2011	7:20:44 PM	BCl3 valve closed
9/6/2011	7:20:44 PM	PH3 valve closed
9/6/2011	7:20:44 PM	SiCl4 pre valve closed
9/6/2011	7:20:44 PM	SiCl4 post valve closed
9/6/2011	7:20:44 PM	Bypass valve closed
9/6/2011	7:20:44 PM	Bubbler valve closed
9/6/2011	7:20:44 PM	Main Vac valve opened
9/6/2011	7:20:44 PM	Helium MFC set to  0.000000
9/6/2011	7:20:44 PM	H2 MFC set to  0.000000
9/6/2011	7:20:44 PM	BCl3 MFC set to  0.000000
9/6/2011	7:20:44 PM	PHl3 MFC set to  0.000000
9/6/2011	7:20:44 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:20:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:20:44 PM	Tube furnace set to 150
9/6/2011	7:21:14 PM	H2 valve closed
9/6/2011	7:21:14 PM	BCl3 valve closed
9/6/2011	7:21:14 PM	PH3 valve closed
9/6/2011	7:21:14 PM	SiCl4 pre valve closed
9/6/2011	7:21:14 PM	SiCl4 post valve closed
9/6/2011	7:21:14 PM	Bypass valve closed
9/6/2011	7:21:14 PM	Bubbler valve closed
9/6/2011	7:21:14 PM	Helium valve opened
9/6/2011	7:21:14 PM	Main Vac valve opened
9/6/2011	7:21:14 PM	Helium MFC set to  20.000000
9/6/2011	7:21:14 PM	H2 MFC set to  0.000000
9/6/2011	7:21:14 PM	BCl3 MFC set to  0.000000
9/6/2011	7:21:14 PM	PHl3 MFC set to  0.000000
9/6/2011	7:21:14 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:21:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:21:14 PM	Tube furnace set to 150
9/6/2011	7:21:44 PM	Helium valve closed
9/6/2011	7:21:44 PM	H2 valve closed
9/6/2011	7:21:44 PM	BCl3 valve closed
9/6/2011	7:21:44 PM	PH3 valve closed
9/6/2011	7:21:44 PM	SiCl4 pre valve closed
9/6/2011	7:21:44 PM	SiCl4 post valve closed
9/6/2011	7:21:44 PM	Bypass valve closed
9/6/2011	7:21:44 PM	Bubbler valve closed
9/6/2011	7:21:44 PM	Main Vac valve opened
9/6/2011	7:21:44 PM	Helium MFC set to  0.000000
9/6/2011	7:21:44 PM	H2 MFC set to  0.000000
9/6/2011	7:21:44 PM	BCl3 MFC set to  0.000000
9/6/2011	7:21:44 PM	PHl3 MFC set to  0.000000
9/6/2011	7:21:44 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:21:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:21:45 PM	Tube furnace set to 150
9/6/2011	7:22:15 PM	H2 valve closed
9/6/2011	7:22:15 PM	BCl3 valve closed
9/6/2011	7:22:15 PM	PH3 valve closed
9/6/2011	7:22:15 PM	SiCl4 pre valve closed
9/6/2011	7:22:15 PM	SiCl4 post valve closed
9/6/2011	7:22:15 PM	Bypass valve closed
9/6/2011	7:22:15 PM	Bubbler valve closed
9/6/2011	7:22:15 PM	Helium valve opened
9/6/2011	7:22:15 PM	Main Vac valve opened
9/6/2011	7:22:15 PM	Helium MFC set to  20.000000
9/6/2011	7:22:15 PM	H2 MFC set to  0.000000
9/6/2011	7:22:15 PM	BCl3 MFC set to  0.000000
9/6/2011	7:22:15 PM	PHl3 MFC set to  0.000000
9/6/2011	7:22:15 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:22:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:22:15 PM	Tube furnace set to 150
9/6/2011	7:22:45 PM	Helium valve closed
9/6/2011	7:22:45 PM	H2 valve closed
9/6/2011	7:22:45 PM	BCl3 valve closed
9/6/2011	7:22:45 PM	PH3 valve closed
9/6/2011	7:22:45 PM	SiCl4 pre valve closed
9/6/2011	7:22:45 PM	SiCl4 post valve closed
9/6/2011	7:22:45 PM	Bypass valve closed
9/6/2011	7:22:45 PM	Bubbler valve closed
9/6/2011	7:22:45 PM	Main Vac valve opened
9/6/2011	7:22:45 PM	Helium MFC set to  0.000000
9/6/2011	7:22:45 PM	H2 MFC set to  0.000000
9/6/2011	7:22:45 PM	BCl3 MFC set to  0.000000
9/6/2011	7:22:45 PM	PHl3 MFC set to  0.000000
9/6/2011	7:22:45 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:22:45 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:22:45 PM	Tube furnace set to 150
9/6/2011	7:23:15 PM	H2 valve closed
9/6/2011	7:23:15 PM	BCl3 valve closed
9/6/2011	7:23:15 PM	PH3 valve closed
9/6/2011	7:23:15 PM	SiCl4 pre valve closed
9/6/2011	7:23:15 PM	SiCl4 post valve closed
9/6/2011	7:23:15 PM	Bypass valve closed
9/6/2011	7:23:15 PM	Bubbler valve closed
9/6/2011	7:23:15 PM	Helium valve opened
9/6/2011	7:23:15 PM	Main Vac valve opened
9/6/2011	7:23:15 PM	Helium MFC set to  20.000000
9/6/2011	7:23:15 PM	H2 MFC set to  0.000000
9/6/2011	7:23:15 PM	BCl3 MFC set to  0.000000
9/6/2011	7:23:15 PM	PHl3 MFC set to  0.000000
9/6/2011	7:23:15 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:23:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:23:15 PM	Tube furnace set to 150
9/6/2011	7:23:45 PM	Helium valve closed
9/6/2011	7:23:45 PM	H2 valve closed
9/6/2011	7:23:45 PM	BCl3 valve closed
9/6/2011	7:23:45 PM	PH3 valve closed
9/6/2011	7:23:45 PM	SiCl4 pre valve closed
9/6/2011	7:23:45 PM	SiCl4 post valve closed
9/6/2011	7:23:45 PM	Bypass valve closed
9/6/2011	7:23:45 PM	Bubbler valve closed
9/6/2011	7:23:45 PM	Main Vac valve opened
9/6/2011	7:23:45 PM	Helium MFC set to  0.000000
9/6/2011	7:23:45 PM	H2 MFC set to  0.000000
9/6/2011	7:23:45 PM	BCl3 MFC set to  0.000000
9/6/2011	7:23:45 PM	PHl3 MFC set to  0.000000
9/6/2011	7:23:45 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:23:45 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:23:45 PM	Tube furnace set to 150
9/6/2011	7:24:15 PM	H2 valve closed
9/6/2011	7:24:15 PM	BCl3 valve closed
9/6/2011	7:24:15 PM	PH3 valve closed
9/6/2011	7:24:15 PM	SiCl4 pre valve closed
9/6/2011	7:24:15 PM	SiCl4 post valve closed
9/6/2011	7:24:15 PM	Bypass valve closed
9/6/2011	7:24:15 PM	Bubbler valve closed
9/6/2011	7:24:15 PM	Helium valve opened
9/6/2011	7:24:15 PM	Main Vac valve opened
9/6/2011	7:24:15 PM	Helium MFC set to  20.000000
9/6/2011	7:24:15 PM	H2 MFC set to  0.000000
9/6/2011	7:24:15 PM	BCl3 MFC set to  0.000000
9/6/2011	7:24:15 PM	PHl3 MFC set to  0.000000
9/6/2011	7:24:15 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:24:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:24:16 PM	Tube furnace set to 150
9/6/2011	7:24:46 PM	Helium valve closed
9/6/2011	7:24:46 PM	H2 valve closed
9/6/2011	7:24:46 PM	BCl3 valve closed
9/6/2011	7:24:46 PM	PH3 valve closed
9/6/2011	7:24:46 PM	SiCl4 pre valve closed
9/6/2011	7:24:46 PM	SiCl4 post valve closed
9/6/2011	7:24:46 PM	Bypass valve closed
9/6/2011	7:24:46 PM	Bubbler valve closed
9/6/2011	7:24:46 PM	Main Vac valve opened
9/6/2011	7:24:46 PM	Helium MFC set to  0.000000
9/6/2011	7:24:46 PM	H2 MFC set to  0.000000
9/6/2011	7:24:46 PM	BCl3 MFC set to  0.000000
9/6/2011	7:24:46 PM	PHl3 MFC set to  0.000000
9/6/2011	7:24:46 PM	SiCl4 MFC set to  0.000000
9/6/2011	7:24:46 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	7:24:46 PM	Tube furnace set to 150
9/6/2011	7:24:47 PM	Run finished at 7:24 PM
9/6/2011	8:22:08 PM	Recipe started at 8:22 PM
9/6/2011	8:22:08 PM	Helium valve closed
9/6/2011	8:22:08 PM	H2 valve closed
9/6/2011	8:22:08 PM	BCl3 valve closed
9/6/2011	8:22:08 PM	PH3 valve closed
9/6/2011	8:22:08 PM	SiCl4 pre valve closed
9/6/2011	8:22:08 PM	SiCl4 post valve closed
9/6/2011	8:22:08 PM	Main Vac valve closed
9/6/2011	8:22:08 PM	Bypass valve closed
9/6/2011	8:22:08 PM	Bubbler valve closed
9/6/2011	8:22:08 PM	Helium MFC set to  0.000000
9/6/2011	8:22:08 PM	H2 MFC set to  0.000000
9/6/2011	8:22:08 PM	BCl3 MFC set to  0.000000
9/6/2011	8:22:08 PM	PHl3 MFC set to  0.000000
9/6/2011	8:22:08 PM	SiCl4 MFC set to  0.000000
9/6/2011	8:22:08 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:22:08 PM	Tube furnace set to 0
9/6/2011	8:22:11 PM	Helium valve closed
9/6/2011	8:22:11 PM	BCl3 valve closed
9/6/2011	8:22:11 PM	PH3 valve closed
9/6/2011	8:22:11 PM	SiCl4 pre valve closed
9/6/2011	8:22:11 PM	SiCl4 post valve closed
9/6/2011	8:22:11 PM	Main Vac valve closed
9/6/2011	8:22:11 PM	Bypass valve closed
9/6/2011	8:22:11 PM	Bubbler valve closed
9/6/2011	8:22:11 PM	H2 valve opened
9/6/2011	8:22:11 PM	Helium MFC set to  0.000000
9/6/2011	8:22:11 PM	H2 MFC set to  500.000000
9/6/2011	8:22:11 PM	BCl3 MFC set to  0.000000
9/6/2011	8:22:11 PM	PHl3 MFC set to  0.000000
9/6/2011	8:22:11 PM	SiCl4 MFC set to  0.000000
9/6/2011	8:22:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:22:11 PM	Tube furnace set to 0
9/6/2011	8:23:14 PM	Helium valve closed
9/6/2011	8:23:14 PM	BCl3 valve closed
9/6/2011	8:23:14 PM	PH3 valve closed
9/6/2011	8:23:14 PM	SiCl4 pre valve closed
9/6/2011	8:23:14 PM	SiCl4 post valve closed
9/6/2011	8:23:14 PM	Main Vac valve closed
9/6/2011	8:23:14 PM	Bypass valve closed
9/6/2011	8:23:14 PM	H2 valve opened
9/6/2011	8:23:14 PM	Bubbler valve opened
9/6/2011	8:23:14 PM	Helium MFC set to  0.000000
9/6/2011	8:23:14 PM	H2 MFC set to  500.000000
9/6/2011	8:23:14 PM	BCl3 MFC set to  0.000000
9/6/2011	8:23:14 PM	PHl3 MFC set to  0.000000
9/6/2011	8:23:14 PM	SiCl4 MFC set to  0.000000
9/6/2011	8:23:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:23:14 PM	Tube furnace set to 0
9/6/2011	8:23:15 PM	Helium valve closed
9/6/2011	8:23:15 PM	BCl3 valve closed
9/6/2011	8:23:15 PM	PH3 valve closed
9/6/2011	8:23:15 PM	SiCl4 pre valve closed
9/6/2011	8:23:15 PM	SiCl4 post valve closed
9/6/2011	8:23:15 PM	Main Vac valve closed
9/6/2011	8:23:15 PM	Bypass valve closed
9/6/2011	8:23:15 PM	H2 valve opened
9/6/2011	8:23:15 PM	Bubbler valve opened
9/6/2011	8:23:15 PM	Helium MFC set to  0.000000
9/6/2011	8:23:15 PM	H2 MFC set to  500.000000
9/6/2011	8:23:15 PM	BCl3 MFC set to  0.000000
9/6/2011	8:23:15 PM	PHl3 MFC set to  0.000000
9/6/2011	8:23:15 PM	SiCl4 MFC set to  0.000000
9/6/2011	8:23:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:23:15 PM	Tube furnace set to 1000
9/6/2011	8:43:15 PM	Helium valve closed
9/6/2011	8:43:15 PM	PH3 valve closed
9/6/2011	8:43:15 PM	Main Vac valve closed
9/6/2011	8:43:15 PM	Bypass valve closed
9/6/2011	8:43:15 PM	H2 valve opened
9/6/2011	8:43:15 PM	BCl3 valve opened
9/6/2011	8:43:15 PM	SiCl4 pre valve opened
9/6/2011	8:43:15 PM	SiCl4 post valve opened
9/6/2011	8:43:15 PM	Bubbler valve opened
9/6/2011	8:43:15 PM	Helium MFC set to  0.000000
9/6/2011	8:43:15 PM	H2 MFC set to  500.000000
9/6/2011	8:43:15 PM	BCl3 MFC set to  2.000000
9/6/2011	8:43:15 PM	PHl3 MFC set to  0.000000
9/6/2011	8:43:15 PM	SiCl4 MFC set to  50.000000
9/6/2011	8:43:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:43:15 PM	Tube furnace set to 1000
9/6/2011	8:59:55 PM	Helium valve closed
9/6/2011	8:59:55 PM	BCl3 valve closed
9/6/2011	8:59:55 PM	PH3 valve closed
9/6/2011	8:59:55 PM	SiCl4 pre valve closed
9/6/2011	8:59:55 PM	SiCl4 post valve closed
9/6/2011	8:59:55 PM	Main Vac valve closed
9/6/2011	8:59:55 PM	Bypass valve closed
9/6/2011	8:59:55 PM	H2 valve opened
9/6/2011	8:59:55 PM	Bubbler valve opened
9/6/2011	8:59:55 PM	Helium MFC set to  0.000000
9/6/2011	8:59:55 PM	H2 MFC set to  500.000000
9/6/2011	8:59:55 PM	BCl3 MFC set to  0.000000
9/6/2011	8:59:55 PM	PHl3 MFC set to  0.000000
9/6/2011	8:59:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	8:59:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	8:59:55 PM	Tube furnace set to 750
9/6/2011	9:04:55 PM	H2 valve closed
9/6/2011	9:04:55 PM	BCl3 valve closed
9/6/2011	9:04:55 PM	PH3 valve closed
9/6/2011	9:04:55 PM	SiCl4 pre valve closed
9/6/2011	9:04:55 PM	SiCl4 post valve closed
9/6/2011	9:04:55 PM	Main Vac valve closed
9/6/2011	9:04:55 PM	Bypass valve closed
9/6/2011	9:04:55 PM	Helium valve opened
9/6/2011	9:04:55 PM	Bubbler valve opened
9/6/2011	9:04:55 PM	Helium MFC set to  500.000000
9/6/2011	9:04:55 PM	H2 MFC set to  0.000000
9/6/2011	9:04:55 PM	BCl3 MFC set to  0.000000
9/6/2011	9:04:55 PM	PHl3 MFC set to  0.000000
9/6/2011	9:04:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:04:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:04:56 PM	Tube furnace set to 0
9/6/2011	9:12:56 PM	Run aborted at 9:12 PM
9/6/2011	9:12:56 PM	Helium valve closed
9/6/2011	9:12:56 PM	H2 valve closed
9/6/2011	9:12:56 PM	BCl3 valve closed
9/6/2011	9:12:56 PM	PH3 valve closed
9/6/2011	9:12:56 PM	SiCl4 pre valve closed
9/6/2011	9:12:56 PM	SiCl4 post valve closed
9/6/2011	9:12:56 PM	Bypass valve closed
9/6/2011	9:12:56 PM	Main Vac valve closed
9/6/2011	9:12:56 PM	Bubbler valve closed
9/6/2011	9:12:56 PM	Helium MFC set to  0.000000
9/6/2011	9:12:56 PM	H2 MFC set to  0.000000
9/6/2011	9:12:56 PM	BCl3 MFC set to  0.000000
9/6/2011	9:12:56 PM	PHl3 MFC set to  0.000000
9/6/2011	9:12:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:12:56 PM	Tube furnace set to 0
9/6/2011	9:22:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	9:22:30 PM	Recipe started at 9:22 PM
9/6/2011	9:22:30 PM	Helium valve closed
9/6/2011	9:22:30 PM	H2 valve closed
9/6/2011	9:22:30 PM	BCl3 valve closed
9/6/2011	9:22:30 PM	PH3 valve closed
9/6/2011	9:22:30 PM	SiCl4 pre valve closed
9/6/2011	9:22:30 PM	SiCl4 post valve closed
9/6/2011	9:22:30 PM	Main Vac valve closed
9/6/2011	9:22:30 PM	Bubbler valve closed
9/6/2011	9:22:30 PM	Bypass valve opened
9/6/2011	9:22:30 PM	Helium MFC set to  0.000000
9/6/2011	9:22:30 PM	H2 MFC set to  0.000000
9/6/2011	9:22:30 PM	BCl3 MFC set to  0.000000
9/6/2011	9:22:30 PM	PHl3 MFC set to  0.000000
9/6/2011	9:22:30 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:22:30 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:22:31 PM	Tube furnace set to 0
9/6/2011	9:23:41 PM	Helium valve closed
9/6/2011	9:23:41 PM	H2 valve closed
9/6/2011	9:23:41 PM	BCl3 valve closed
9/6/2011	9:23:41 PM	PH3 valve closed
9/6/2011	9:23:41 PM	SiCl4 pre valve closed
9/6/2011	9:23:41 PM	SiCl4 post valve closed
9/6/2011	9:23:41 PM	Main Vac valve closed
9/6/2011	9:23:41 PM	Bubbler valve closed
9/6/2011	9:23:41 PM	Bypass valve opened
9/6/2011	9:23:41 PM	Helium MFC set to  0.000000
9/6/2011	9:23:41 PM	H2 MFC set to  0.000000
9/6/2011	9:23:41 PM	BCl3 MFC set to  0.000000
9/6/2011	9:23:41 PM	PHl3 MFC set to  0.000000
9/6/2011	9:23:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:23:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:23:41 PM	Tube furnace set to 0
9/6/2011	9:24:41 PM	Helium valve closed
9/6/2011	9:24:41 PM	H2 valve closed
9/6/2011	9:24:41 PM	BCl3 valve closed
9/6/2011	9:24:41 PM	PH3 valve closed
9/6/2011	9:24:41 PM	SiCl4 pre valve closed
9/6/2011	9:24:41 PM	SiCl4 post valve closed
9/6/2011	9:24:41 PM	Bypass valve closed
9/6/2011	9:24:41 PM	Bubbler valve closed
9/6/2011	9:24:41 PM	Main Vac valve opened
9/6/2011	9:24:41 PM	Helium MFC set to  0.000000
9/6/2011	9:24:41 PM	H2 MFC set to  0.000000
9/6/2011	9:24:41 PM	BCl3 MFC set to  0.000000
9/6/2011	9:24:41 PM	PHl3 MFC set to  0.000000
9/6/2011	9:24:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:24:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:24:41 PM	Tube furnace set to 0
9/6/2011	9:24:42 PM	Run finished at 9:24 PM
9/6/2011	9:24:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	9:25:40 PM	Recipe started at 9:25 PM
9/6/2011	9:25:40 PM	Helium valve closed
9/6/2011	9:25:40 PM	H2 valve closed
9/6/2011	9:25:40 PM	BCl3 valve closed
9/6/2011	9:25:40 PM	PH3 valve closed
9/6/2011	9:25:40 PM	SiCl4 pre valve closed
9/6/2011	9:25:40 PM	SiCl4 post valve closed
9/6/2011	9:25:40 PM	Bypass valve closed
9/6/2011	9:25:40 PM	Bubbler valve closed
9/6/2011	9:25:40 PM	Main Vac valve opened
9/6/2011	9:25:40 PM	Helium MFC set to  0.000000
9/6/2011	9:25:40 PM	H2 MFC set to  0.000000
9/6/2011	9:25:40 PM	BCl3 MFC set to  0.000000
9/6/2011	9:25:40 PM	PHl3 MFC set to  0.000000
9/6/2011	9:25:40 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:25:40 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:25:40 PM	Tube furnace set to 150
9/6/2011	9:26:10 PM	H2 valve closed
9/6/2011	9:26:10 PM	BCl3 valve closed
9/6/2011	9:26:10 PM	PH3 valve closed
9/6/2011	9:26:10 PM	SiCl4 pre valve closed
9/6/2011	9:26:10 PM	SiCl4 post valve closed
9/6/2011	9:26:10 PM	Bypass valve closed
9/6/2011	9:26:10 PM	Bubbler valve closed
9/6/2011	9:26:10 PM	Helium valve opened
9/6/2011	9:26:10 PM	Main Vac valve opened
9/6/2011	9:26:10 PM	Helium MFC set to  20.000000
9/6/2011	9:26:10 PM	H2 MFC set to  0.000000
9/6/2011	9:26:10 PM	BCl3 MFC set to  0.000000
9/6/2011	9:26:10 PM	PHl3 MFC set to  0.000000
9/6/2011	9:26:10 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:26:10 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:26:10 PM	Tube furnace set to 150
9/6/2011	9:26:40 PM	Helium valve closed
9/6/2011	9:26:40 PM	H2 valve closed
9/6/2011	9:26:40 PM	BCl3 valve closed
9/6/2011	9:26:40 PM	PH3 valve closed
9/6/2011	9:26:40 PM	SiCl4 pre valve closed
9/6/2011	9:26:40 PM	SiCl4 post valve closed
9/6/2011	9:26:40 PM	Bypass valve closed
9/6/2011	9:26:40 PM	Bubbler valve closed
9/6/2011	9:26:40 PM	Main Vac valve opened
9/6/2011	9:26:40 PM	Helium MFC set to  0.000000
9/6/2011	9:26:40 PM	H2 MFC set to  0.000000
9/6/2011	9:26:40 PM	BCl3 MFC set to  0.000000
9/6/2011	9:26:40 PM	PHl3 MFC set to  0.000000
9/6/2011	9:26:40 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:26:40 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:26:40 PM	Tube furnace set to 150
9/6/2011	9:27:10 PM	H2 valve closed
9/6/2011	9:27:10 PM	BCl3 valve closed
9/6/2011	9:27:10 PM	PH3 valve closed
9/6/2011	9:27:10 PM	SiCl4 pre valve closed
9/6/2011	9:27:10 PM	SiCl4 post valve closed
9/6/2011	9:27:10 PM	Bypass valve closed
9/6/2011	9:27:10 PM	Bubbler valve closed
9/6/2011	9:27:10 PM	Helium valve opened
9/6/2011	9:27:10 PM	Main Vac valve opened
9/6/2011	9:27:10 PM	Helium MFC set to  20.000000
9/6/2011	9:27:10 PM	H2 MFC set to  0.000000
9/6/2011	9:27:10 PM	BCl3 MFC set to  0.000000
9/6/2011	9:27:10 PM	PHl3 MFC set to  0.000000
9/6/2011	9:27:10 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:27:10 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:27:10 PM	Tube furnace set to 150
9/6/2011	9:27:40 PM	Helium valve closed
9/6/2011	9:27:40 PM	H2 valve closed
9/6/2011	9:27:40 PM	BCl3 valve closed
9/6/2011	9:27:40 PM	PH3 valve closed
9/6/2011	9:27:40 PM	SiCl4 pre valve closed
9/6/2011	9:27:40 PM	SiCl4 post valve closed
9/6/2011	9:27:40 PM	Bypass valve closed
9/6/2011	9:27:40 PM	Bubbler valve closed
9/6/2011	9:27:40 PM	Main Vac valve opened
9/6/2011	9:27:40 PM	Helium MFC set to  0.000000
9/6/2011	9:27:40 PM	H2 MFC set to  0.000000
9/6/2011	9:27:40 PM	BCl3 MFC set to  0.000000
9/6/2011	9:27:40 PM	PHl3 MFC set to  0.000000
9/6/2011	9:27:40 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:27:40 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:27:41 PM	Tube furnace set to 150
9/6/2011	9:28:11 PM	H2 valve closed
9/6/2011	9:28:11 PM	BCl3 valve closed
9/6/2011	9:28:11 PM	PH3 valve closed
9/6/2011	9:28:11 PM	SiCl4 pre valve closed
9/6/2011	9:28:11 PM	SiCl4 post valve closed
9/6/2011	9:28:11 PM	Bypass valve closed
9/6/2011	9:28:11 PM	Bubbler valve closed
9/6/2011	9:28:11 PM	Helium valve opened
9/6/2011	9:28:11 PM	Main Vac valve opened
9/6/2011	9:28:11 PM	Helium MFC set to  20.000000
9/6/2011	9:28:11 PM	H2 MFC set to  0.000000
9/6/2011	9:28:11 PM	BCl3 MFC set to  0.000000
9/6/2011	9:28:11 PM	PHl3 MFC set to  0.000000
9/6/2011	9:28:11 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:28:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:28:11 PM	Tube furnace set to 150
9/6/2011	9:28:41 PM	Helium valve closed
9/6/2011	9:28:41 PM	H2 valve closed
9/6/2011	9:28:41 PM	BCl3 valve closed
9/6/2011	9:28:41 PM	PH3 valve closed
9/6/2011	9:28:41 PM	SiCl4 pre valve closed
9/6/2011	9:28:41 PM	SiCl4 post valve closed
9/6/2011	9:28:41 PM	Bypass valve closed
9/6/2011	9:28:41 PM	Bubbler valve closed
9/6/2011	9:28:41 PM	Main Vac valve opened
9/6/2011	9:28:41 PM	Helium MFC set to  0.000000
9/6/2011	9:28:41 PM	H2 MFC set to  0.000000
9/6/2011	9:28:41 PM	BCl3 MFC set to  0.000000
9/6/2011	9:28:41 PM	PHl3 MFC set to  0.000000
9/6/2011	9:28:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:28:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:28:41 PM	Tube furnace set to 150
9/6/2011	9:29:11 PM	H2 valve closed
9/6/2011	9:29:11 PM	BCl3 valve closed
9/6/2011	9:29:11 PM	PH3 valve closed
9/6/2011	9:29:11 PM	SiCl4 pre valve closed
9/6/2011	9:29:11 PM	SiCl4 post valve closed
9/6/2011	9:29:11 PM	Bypass valve closed
9/6/2011	9:29:11 PM	Bubbler valve closed
9/6/2011	9:29:11 PM	Helium valve opened
9/6/2011	9:29:11 PM	Main Vac valve opened
9/6/2011	9:29:11 PM	Helium MFC set to  20.000000
9/6/2011	9:29:11 PM	H2 MFC set to  0.000000
9/6/2011	9:29:11 PM	BCl3 MFC set to  0.000000
9/6/2011	9:29:11 PM	PHl3 MFC set to  0.000000
9/6/2011	9:29:11 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:29:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:29:11 PM	Tube furnace set to 150
9/6/2011	9:29:41 PM	Helium valve closed
9/6/2011	9:29:41 PM	H2 valve closed
9/6/2011	9:29:41 PM	BCl3 valve closed
9/6/2011	9:29:41 PM	PH3 valve closed
9/6/2011	9:29:41 PM	SiCl4 pre valve closed
9/6/2011	9:29:41 PM	SiCl4 post valve closed
9/6/2011	9:29:41 PM	Bypass valve closed
9/6/2011	9:29:41 PM	Bubbler valve closed
9/6/2011	9:29:41 PM	Main Vac valve opened
9/6/2011	9:29:41 PM	Helium MFC set to  0.000000
9/6/2011	9:29:41 PM	H2 MFC set to  0.000000
9/6/2011	9:29:41 PM	BCl3 MFC set to  0.000000
9/6/2011	9:29:41 PM	PHl3 MFC set to  0.000000
9/6/2011	9:29:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:29:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:29:41 PM	Tube furnace set to 150
9/6/2011	9:30:12 PM	H2 valve closed
9/6/2011	9:30:12 PM	BCl3 valve closed
9/6/2011	9:30:12 PM	PH3 valve closed
9/6/2011	9:30:12 PM	SiCl4 pre valve closed
9/6/2011	9:30:12 PM	SiCl4 post valve closed
9/6/2011	9:30:12 PM	Bypass valve closed
9/6/2011	9:30:12 PM	Bubbler valve closed
9/6/2011	9:30:12 PM	Helium valve opened
9/6/2011	9:30:12 PM	Main Vac valve opened
9/6/2011	9:30:12 PM	Helium MFC set to  20.000000
9/6/2011	9:30:12 PM	H2 MFC set to  0.000000
9/6/2011	9:30:12 PM	BCl3 MFC set to  0.000000
9/6/2011	9:30:12 PM	PHl3 MFC set to  0.000000
9/6/2011	9:30:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:30:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:30:12 PM	Tube furnace set to 150
9/6/2011	9:30:42 PM	Helium valve closed
9/6/2011	9:30:42 PM	H2 valve closed
9/6/2011	9:30:42 PM	BCl3 valve closed
9/6/2011	9:30:42 PM	PH3 valve closed
9/6/2011	9:30:42 PM	SiCl4 pre valve closed
9/6/2011	9:30:42 PM	SiCl4 post valve closed
9/6/2011	9:30:42 PM	Bypass valve closed
9/6/2011	9:30:42 PM	Bubbler valve closed
9/6/2011	9:30:42 PM	Main Vac valve opened
9/6/2011	9:30:42 PM	Helium MFC set to  0.000000
9/6/2011	9:30:42 PM	H2 MFC set to  0.000000
9/6/2011	9:30:42 PM	BCl3 MFC set to  0.000000
9/6/2011	9:30:42 PM	PHl3 MFC set to  0.000000
9/6/2011	9:30:42 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:30:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:30:42 PM	Tube furnace set to 150
9/6/2011	9:31:12 PM	H2 valve closed
9/6/2011	9:31:12 PM	BCl3 valve closed
9/6/2011	9:31:12 PM	PH3 valve closed
9/6/2011	9:31:12 PM	SiCl4 pre valve closed
9/6/2011	9:31:12 PM	SiCl4 post valve closed
9/6/2011	9:31:12 PM	Bypass valve closed
9/6/2011	9:31:12 PM	Bubbler valve closed
9/6/2011	9:31:12 PM	Helium valve opened
9/6/2011	9:31:12 PM	Main Vac valve opened
9/6/2011	9:31:12 PM	Helium MFC set to  20.000000
9/6/2011	9:31:12 PM	H2 MFC set to  0.000000
9/6/2011	9:31:12 PM	BCl3 MFC set to  0.000000
9/6/2011	9:31:12 PM	PHl3 MFC set to  0.000000
9/6/2011	9:31:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:31:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:31:12 PM	Tube furnace set to 150
9/6/2011	9:31:42 PM	Helium valve closed
9/6/2011	9:31:42 PM	H2 valve closed
9/6/2011	9:31:42 PM	BCl3 valve closed
9/6/2011	9:31:42 PM	PH3 valve closed
9/6/2011	9:31:42 PM	SiCl4 pre valve closed
9/6/2011	9:31:42 PM	SiCl4 post valve closed
9/6/2011	9:31:42 PM	Bypass valve closed
9/6/2011	9:31:42 PM	Bubbler valve closed
9/6/2011	9:31:42 PM	Main Vac valve opened
9/6/2011	9:31:42 PM	Helium MFC set to  0.000000
9/6/2011	9:31:42 PM	H2 MFC set to  0.000000
9/6/2011	9:31:42 PM	BCl3 MFC set to  0.000000
9/6/2011	9:31:42 PM	PHl3 MFC set to  0.000000
9/6/2011	9:31:42 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:31:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:31:42 PM	Tube furnace set to 150
9/6/2011	9:32:12 PM	H2 valve closed
9/6/2011	9:32:12 PM	BCl3 valve closed
9/6/2011	9:32:12 PM	PH3 valve closed
9/6/2011	9:32:12 PM	SiCl4 pre valve closed
9/6/2011	9:32:12 PM	SiCl4 post valve closed
9/6/2011	9:32:12 PM	Bypass valve closed
9/6/2011	9:32:12 PM	Bubbler valve closed
9/6/2011	9:32:12 PM	Helium valve opened
9/6/2011	9:32:12 PM	Main Vac valve opened
9/6/2011	9:32:12 PM	Helium MFC set to  20.000000
9/6/2011	9:32:12 PM	H2 MFC set to  0.000000
9/6/2011	9:32:12 PM	BCl3 MFC set to  0.000000
9/6/2011	9:32:12 PM	PHl3 MFC set to  0.000000
9/6/2011	9:32:12 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:32:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:32:13 PM	Tube furnace set to 150
9/6/2011	9:32:43 PM	Helium valve closed
9/6/2011	9:32:43 PM	H2 valve closed
9/6/2011	9:32:43 PM	BCl3 valve closed
9/6/2011	9:32:43 PM	PH3 valve closed
9/6/2011	9:32:43 PM	SiCl4 pre valve closed
9/6/2011	9:32:43 PM	SiCl4 post valve closed
9/6/2011	9:32:43 PM	Bypass valve closed
9/6/2011	9:32:43 PM	Bubbler valve closed
9/6/2011	9:32:43 PM	Main Vac valve opened
9/6/2011	9:32:43 PM	Helium MFC set to  0.000000
9/6/2011	9:32:43 PM	H2 MFC set to  0.000000
9/6/2011	9:32:43 PM	BCl3 MFC set to  0.000000
9/6/2011	9:32:43 PM	PHl3 MFC set to  0.000000
9/6/2011	9:32:43 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:32:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:32:43 PM	Tube furnace set to 150
9/6/2011	9:33:13 PM	H2 valve closed
9/6/2011	9:33:13 PM	BCl3 valve closed
9/6/2011	9:33:13 PM	PH3 valve closed
9/6/2011	9:33:13 PM	SiCl4 pre valve closed
9/6/2011	9:33:13 PM	SiCl4 post valve closed
9/6/2011	9:33:13 PM	Bypass valve closed
9/6/2011	9:33:13 PM	Bubbler valve closed
9/6/2011	9:33:13 PM	Helium valve opened
9/6/2011	9:33:13 PM	Main Vac valve opened
9/6/2011	9:33:13 PM	Helium MFC set to  20.000000
9/6/2011	9:33:13 PM	H2 MFC set to  0.000000
9/6/2011	9:33:13 PM	BCl3 MFC set to  0.000000
9/6/2011	9:33:13 PM	PHl3 MFC set to  0.000000
9/6/2011	9:33:13 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:33:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:33:13 PM	Tube furnace set to 150
9/6/2011	9:33:43 PM	Helium valve closed
9/6/2011	9:33:43 PM	H2 valve closed
9/6/2011	9:33:43 PM	BCl3 valve closed
9/6/2011	9:33:43 PM	PH3 valve closed
9/6/2011	9:33:43 PM	SiCl4 pre valve closed
9/6/2011	9:33:43 PM	SiCl4 post valve closed
9/6/2011	9:33:43 PM	Bypass valve closed
9/6/2011	9:33:43 PM	Bubbler valve closed
9/6/2011	9:33:43 PM	Main Vac valve opened
9/6/2011	9:33:43 PM	Helium MFC set to  0.000000
9/6/2011	9:33:43 PM	H2 MFC set to  0.000000
9/6/2011	9:33:43 PM	BCl3 MFC set to  0.000000
9/6/2011	9:33:43 PM	PHl3 MFC set to  0.000000
9/6/2011	9:33:43 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:33:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:33:43 PM	Tube furnace set to 150
9/6/2011	9:34:13 PM	H2 valve closed
9/6/2011	9:34:13 PM	BCl3 valve closed
9/6/2011	9:34:13 PM	PH3 valve closed
9/6/2011	9:34:13 PM	SiCl4 pre valve closed
9/6/2011	9:34:13 PM	SiCl4 post valve closed
9/6/2011	9:34:13 PM	Bypass valve closed
9/6/2011	9:34:13 PM	Bubbler valve closed
9/6/2011	9:34:13 PM	Helium valve opened
9/6/2011	9:34:13 PM	Main Vac valve opened
9/6/2011	9:34:13 PM	Helium MFC set to  20.000000
9/6/2011	9:34:13 PM	H2 MFC set to  0.000000
9/6/2011	9:34:13 PM	BCl3 MFC set to  0.000000
9/6/2011	9:34:13 PM	PHl3 MFC set to  0.000000
9/6/2011	9:34:13 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:34:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:34:13 PM	Tube furnace set to 150
9/6/2011	9:34:43 PM	Helium valve closed
9/6/2011	9:34:43 PM	H2 valve closed
9/6/2011	9:34:43 PM	BCl3 valve closed
9/6/2011	9:34:43 PM	PH3 valve closed
9/6/2011	9:34:43 PM	SiCl4 pre valve closed
9/6/2011	9:34:43 PM	SiCl4 post valve closed
9/6/2011	9:34:43 PM	Bypass valve closed
9/6/2011	9:34:43 PM	Bubbler valve closed
9/6/2011	9:34:43 PM	Main Vac valve opened
9/6/2011	9:34:43 PM	Helium MFC set to  0.000000
9/6/2011	9:34:43 PM	H2 MFC set to  0.000000
9/6/2011	9:34:43 PM	BCl3 MFC set to  0.000000
9/6/2011	9:34:43 PM	PHl3 MFC set to  0.000000
9/6/2011	9:34:43 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:34:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:34:44 PM	Tube furnace set to 150
9/6/2011	9:35:14 PM	H2 valve closed
9/6/2011	9:35:14 PM	BCl3 valve closed
9/6/2011	9:35:14 PM	PH3 valve closed
9/6/2011	9:35:14 PM	SiCl4 pre valve closed
9/6/2011	9:35:14 PM	SiCl4 post valve closed
9/6/2011	9:35:14 PM	Bypass valve closed
9/6/2011	9:35:14 PM	Bubbler valve closed
9/6/2011	9:35:14 PM	Helium valve opened
9/6/2011	9:35:14 PM	Main Vac valve opened
9/6/2011	9:35:14 PM	Helium MFC set to  20.000000
9/6/2011	9:35:14 PM	H2 MFC set to  0.000000
9/6/2011	9:35:14 PM	BCl3 MFC set to  0.000000
9/6/2011	9:35:14 PM	PHl3 MFC set to  0.000000
9/6/2011	9:35:14 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:35:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:35:14 PM	Tube furnace set to 150
9/6/2011	9:35:44 PM	Helium valve closed
9/6/2011	9:35:44 PM	H2 valve closed
9/6/2011	9:35:44 PM	BCl3 valve closed
9/6/2011	9:35:44 PM	PH3 valve closed
9/6/2011	9:35:44 PM	SiCl4 pre valve closed
9/6/2011	9:35:44 PM	SiCl4 post valve closed
9/6/2011	9:35:44 PM	Bypass valve closed
9/6/2011	9:35:44 PM	Bubbler valve closed
9/6/2011	9:35:44 PM	Main Vac valve opened
9/6/2011	9:35:44 PM	Helium MFC set to  0.000000
9/6/2011	9:35:44 PM	H2 MFC set to  0.000000
9/6/2011	9:35:44 PM	BCl3 MFC set to  0.000000
9/6/2011	9:35:44 PM	PHl3 MFC set to  0.000000
9/6/2011	9:35:44 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:35:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:35:44 PM	Tube furnace set to 150
9/6/2011	9:35:45 PM	Run finished at 9:35 PM
9/6/2011	9:37:52 PM	Recipe started at 9:37 PM
9/6/2011	9:37:52 PM	Helium valve closed
9/6/2011	9:37:52 PM	H2 valve closed
9/6/2011	9:37:52 PM	BCl3 valve closed
9/6/2011	9:37:52 PM	PH3 valve closed
9/6/2011	9:37:52 PM	SiCl4 pre valve closed
9/6/2011	9:37:52 PM	SiCl4 post valve closed
9/6/2011	9:37:52 PM	Bypass valve closed
9/6/2011	9:37:52 PM	Bubbler valve closed
9/6/2011	9:37:52 PM	Main Vac valve opened
9/6/2011	9:37:52 PM	Helium MFC set to  0.000000
9/6/2011	9:37:52 PM	H2 MFC set to  0.000000
9/6/2011	9:37:52 PM	BCl3 MFC set to  0.000000
9/6/2011	9:37:52 PM	PHl3 MFC set to  0.000000
9/6/2011	9:37:52 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:37:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:37:52 PM	Tube furnace set to 150
9/6/2011	9:38:22 PM	H2 valve closed
9/6/2011	9:38:22 PM	BCl3 valve closed
9/6/2011	9:38:22 PM	PH3 valve closed
9/6/2011	9:38:22 PM	SiCl4 pre valve closed
9/6/2011	9:38:22 PM	SiCl4 post valve closed
9/6/2011	9:38:22 PM	Bypass valve closed
9/6/2011	9:38:22 PM	Bubbler valve closed
9/6/2011	9:38:22 PM	Helium valve opened
9/6/2011	9:38:22 PM	Main Vac valve opened
9/6/2011	9:38:22 PM	Helium MFC set to  20.000000
9/6/2011	9:38:22 PM	H2 MFC set to  0.000000
9/6/2011	9:38:22 PM	BCl3 MFC set to  0.000000
9/6/2011	9:38:22 PM	PHl3 MFC set to  0.000000
9/6/2011	9:38:22 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:38:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:38:22 PM	Tube furnace set to 150
9/6/2011	9:38:52 PM	Helium valve closed
9/6/2011	9:38:52 PM	H2 valve closed
9/6/2011	9:38:52 PM	BCl3 valve closed
9/6/2011	9:38:52 PM	PH3 valve closed
9/6/2011	9:38:52 PM	SiCl4 pre valve closed
9/6/2011	9:38:52 PM	SiCl4 post valve closed
9/6/2011	9:38:52 PM	Bypass valve closed
9/6/2011	9:38:52 PM	Bubbler valve closed
9/6/2011	9:38:52 PM	Main Vac valve opened
9/6/2011	9:38:52 PM	Helium MFC set to  0.000000
9/6/2011	9:38:52 PM	H2 MFC set to  0.000000
9/6/2011	9:38:52 PM	BCl3 MFC set to  0.000000
9/6/2011	9:38:52 PM	PHl3 MFC set to  0.000000
9/6/2011	9:38:52 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:38:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:38:52 PM	Tube furnace set to 150
9/6/2011	9:39:22 PM	H2 valve closed
9/6/2011	9:39:22 PM	BCl3 valve closed
9/6/2011	9:39:23 PM	PH3 valve closed
9/6/2011	9:39:23 PM	SiCl4 pre valve closed
9/6/2011	9:39:23 PM	SiCl4 post valve closed
9/6/2011	9:39:23 PM	Bypass valve closed
9/6/2011	9:39:23 PM	Bubbler valve closed
9/6/2011	9:39:23 PM	Helium valve opened
9/6/2011	9:39:23 PM	Main Vac valve opened
9/6/2011	9:39:23 PM	Helium MFC set to  20.000000
9/6/2011	9:39:23 PM	H2 MFC set to  0.000000
9/6/2011	9:39:23 PM	BCl3 MFC set to  0.000000
9/6/2011	9:39:23 PM	PHl3 MFC set to  0.000000
9/6/2011	9:39:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:39:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:39:23 PM	Tube furnace set to 150
9/6/2011	9:39:53 PM	Helium valve closed
9/6/2011	9:39:53 PM	H2 valve closed
9/6/2011	9:39:53 PM	BCl3 valve closed
9/6/2011	9:39:53 PM	PH3 valve closed
9/6/2011	9:39:53 PM	SiCl4 pre valve closed
9/6/2011	9:39:53 PM	SiCl4 post valve closed
9/6/2011	9:39:53 PM	Bypass valve closed
9/6/2011	9:39:53 PM	Bubbler valve closed
9/6/2011	9:39:53 PM	Main Vac valve opened
9/6/2011	9:39:53 PM	Helium MFC set to  0.000000
9/6/2011	9:39:53 PM	H2 MFC set to  0.000000
9/6/2011	9:39:53 PM	BCl3 MFC set to  0.000000
9/6/2011	9:39:53 PM	PHl3 MFC set to  0.000000
9/6/2011	9:39:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:39:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:39:53 PM	Tube furnace set to 150
9/6/2011	9:40:23 PM	H2 valve closed
9/6/2011	9:40:23 PM	BCl3 valve closed
9/6/2011	9:40:23 PM	PH3 valve closed
9/6/2011	9:40:23 PM	SiCl4 pre valve closed
9/6/2011	9:40:23 PM	SiCl4 post valve closed
9/6/2011	9:40:23 PM	Bypass valve closed
9/6/2011	9:40:23 PM	Bubbler valve closed
9/6/2011	9:40:23 PM	Helium valve opened
9/6/2011	9:40:23 PM	Main Vac valve opened
9/6/2011	9:40:23 PM	Helium MFC set to  20.000000
9/6/2011	9:40:23 PM	H2 MFC set to  0.000000
9/6/2011	9:40:23 PM	BCl3 MFC set to  0.000000
9/6/2011	9:40:23 PM	PHl3 MFC set to  0.000000
9/6/2011	9:40:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:40:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:40:23 PM	Tube furnace set to 150
9/6/2011	9:40:53 PM	Helium valve closed
9/6/2011	9:40:53 PM	H2 valve closed
9/6/2011	9:40:53 PM	BCl3 valve closed
9/6/2011	9:40:53 PM	PH3 valve closed
9/6/2011	9:40:53 PM	SiCl4 pre valve closed
9/6/2011	9:40:53 PM	SiCl4 post valve closed
9/6/2011	9:40:53 PM	Bypass valve closed
9/6/2011	9:40:53 PM	Bubbler valve closed
9/6/2011	9:40:53 PM	Main Vac valve opened
9/6/2011	9:40:53 PM	Helium MFC set to  0.000000
9/6/2011	9:40:53 PM	H2 MFC set to  0.000000
9/6/2011	9:40:53 PM	BCl3 MFC set to  0.000000
9/6/2011	9:40:53 PM	PHl3 MFC set to  0.000000
9/6/2011	9:40:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:40:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:40:53 PM	Tube furnace set to 150
9/6/2011	9:41:23 PM	H2 valve closed
9/6/2011	9:41:23 PM	BCl3 valve closed
9/6/2011	9:41:23 PM	PH3 valve closed
9/6/2011	9:41:23 PM	SiCl4 pre valve closed
9/6/2011	9:41:23 PM	SiCl4 post valve closed
9/6/2011	9:41:23 PM	Bypass valve closed
9/6/2011	9:41:23 PM	Bubbler valve closed
9/6/2011	9:41:23 PM	Helium valve opened
9/6/2011	9:41:23 PM	Main Vac valve opened
9/6/2011	9:41:23 PM	Helium MFC set to  20.000000
9/6/2011	9:41:23 PM	H2 MFC set to  0.000000
9/6/2011	9:41:23 PM	BCl3 MFC set to  0.000000
9/6/2011	9:41:23 PM	PHl3 MFC set to  0.000000
9/6/2011	9:41:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:41:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:41:23 PM	Tube furnace set to 150
9/6/2011	9:41:53 PM	Helium valve closed
9/6/2011	9:41:53 PM	H2 valve closed
9/6/2011	9:41:53 PM	BCl3 valve closed
9/6/2011	9:41:53 PM	PH3 valve closed
9/6/2011	9:41:53 PM	SiCl4 pre valve closed
9/6/2011	9:41:53 PM	SiCl4 post valve closed
9/6/2011	9:41:53 PM	Bypass valve closed
9/6/2011	9:41:53 PM	Bubbler valve closed
9/6/2011	9:41:53 PM	Main Vac valve opened
9/6/2011	9:41:54 PM	Helium MFC set to  0.000000
9/6/2011	9:41:54 PM	H2 MFC set to  0.000000
9/6/2011	9:41:54 PM	BCl3 MFC set to  0.000000
9/6/2011	9:41:54 PM	PHl3 MFC set to  0.000000
9/6/2011	9:41:54 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:41:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:41:54 PM	Tube furnace set to 150
9/6/2011	9:42:24 PM	H2 valve closed
9/6/2011	9:42:24 PM	BCl3 valve closed
9/6/2011	9:42:24 PM	PH3 valve closed
9/6/2011	9:42:24 PM	SiCl4 pre valve closed
9/6/2011	9:42:24 PM	SiCl4 post valve closed
9/6/2011	9:42:24 PM	Bypass valve closed
9/6/2011	9:42:24 PM	Bubbler valve closed
9/6/2011	9:42:24 PM	Helium valve opened
9/6/2011	9:42:24 PM	Main Vac valve opened
9/6/2011	9:42:24 PM	Helium MFC set to  20.000000
9/6/2011	9:42:24 PM	H2 MFC set to  0.000000
9/6/2011	9:42:24 PM	BCl3 MFC set to  0.000000
9/6/2011	9:42:24 PM	PHl3 MFC set to  0.000000
9/6/2011	9:42:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:42:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:42:24 PM	Tube furnace set to 150
9/6/2011	9:42:54 PM	Helium valve closed
9/6/2011	9:42:54 PM	H2 valve closed
9/6/2011	9:42:54 PM	BCl3 valve closed
9/6/2011	9:42:54 PM	PH3 valve closed
9/6/2011	9:42:54 PM	SiCl4 pre valve closed
9/6/2011	9:42:54 PM	SiCl4 post valve closed
9/6/2011	9:42:54 PM	Bypass valve closed
9/6/2011	9:42:54 PM	Bubbler valve closed
9/6/2011	9:42:54 PM	Main Vac valve opened
9/6/2011	9:42:54 PM	Helium MFC set to  0.000000
9/6/2011	9:42:54 PM	H2 MFC set to  0.000000
9/6/2011	9:42:54 PM	BCl3 MFC set to  0.000000
9/6/2011	9:42:54 PM	PHl3 MFC set to  0.000000
9/6/2011	9:42:54 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:42:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:42:54 PM	Tube furnace set to 150
9/6/2011	9:43:24 PM	H2 valve closed
9/6/2011	9:43:24 PM	BCl3 valve closed
9/6/2011	9:43:24 PM	PH3 valve closed
9/6/2011	9:43:24 PM	SiCl4 pre valve closed
9/6/2011	9:43:24 PM	SiCl4 post valve closed
9/6/2011	9:43:24 PM	Bypass valve closed
9/6/2011	9:43:24 PM	Bubbler valve closed
9/6/2011	9:43:24 PM	Helium valve opened
9/6/2011	9:43:24 PM	Main Vac valve opened
9/6/2011	9:43:24 PM	Helium MFC set to  20.000000
9/6/2011	9:43:24 PM	H2 MFC set to  0.000000
9/6/2011	9:43:24 PM	BCl3 MFC set to  0.000000
9/6/2011	9:43:24 PM	PHl3 MFC set to  0.000000
9/6/2011	9:43:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:43:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:43:24 PM	Tube furnace set to 150
9/6/2011	9:43:54 PM	Helium valve closed
9/6/2011	9:43:54 PM	H2 valve closed
9/6/2011	9:43:54 PM	BCl3 valve closed
9/6/2011	9:43:54 PM	PH3 valve closed
9/6/2011	9:43:54 PM	SiCl4 pre valve closed
9/6/2011	9:43:54 PM	SiCl4 post valve closed
9/6/2011	9:43:54 PM	Bypass valve closed
9/6/2011	9:43:54 PM	Bubbler valve closed
9/6/2011	9:43:54 PM	Main Vac valve opened
9/6/2011	9:43:54 PM	Helium MFC set to  0.000000
9/6/2011	9:43:54 PM	H2 MFC set to  0.000000
9/6/2011	9:43:54 PM	BCl3 MFC set to  0.000000
9/6/2011	9:43:54 PM	PHl3 MFC set to  0.000000
9/6/2011	9:43:54 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:43:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:43:54 PM	Tube furnace set to 150
9/6/2011	9:44:25 PM	H2 valve closed
9/6/2011	9:44:25 PM	BCl3 valve closed
9/6/2011	9:44:25 PM	PH3 valve closed
9/6/2011	9:44:25 PM	SiCl4 pre valve closed
9/6/2011	9:44:25 PM	SiCl4 post valve closed
9/6/2011	9:44:25 PM	Bypass valve closed
9/6/2011	9:44:25 PM	Bubbler valve closed
9/6/2011	9:44:25 PM	Helium valve opened
9/6/2011	9:44:25 PM	Main Vac valve opened
9/6/2011	9:44:25 PM	Helium MFC set to  20.000000
9/6/2011	9:44:25 PM	H2 MFC set to  0.000000
9/6/2011	9:44:25 PM	BCl3 MFC set to  0.000000
9/6/2011	9:44:25 PM	PHl3 MFC set to  0.000000
9/6/2011	9:44:25 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:44:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:44:25 PM	Tube furnace set to 150
9/6/2011	9:44:55 PM	Helium valve closed
9/6/2011	9:44:55 PM	H2 valve closed
9/6/2011	9:44:55 PM	BCl3 valve closed
9/6/2011	9:44:55 PM	PH3 valve closed
9/6/2011	9:44:55 PM	SiCl4 pre valve closed
9/6/2011	9:44:55 PM	SiCl4 post valve closed
9/6/2011	9:44:55 PM	Bypass valve closed
9/6/2011	9:44:55 PM	Bubbler valve closed
9/6/2011	9:44:55 PM	Main Vac valve opened
9/6/2011	9:44:55 PM	Helium MFC set to  0.000000
9/6/2011	9:44:55 PM	H2 MFC set to  0.000000
9/6/2011	9:44:55 PM	BCl3 MFC set to  0.000000
9/6/2011	9:44:55 PM	PHl3 MFC set to  0.000000
9/6/2011	9:44:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:44:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:44:55 PM	Tube furnace set to 150
9/6/2011	9:45:25 PM	H2 valve closed
9/6/2011	9:45:25 PM	BCl3 valve closed
9/6/2011	9:45:25 PM	PH3 valve closed
9/6/2011	9:45:25 PM	SiCl4 pre valve closed
9/6/2011	9:45:25 PM	SiCl4 post valve closed
9/6/2011	9:45:25 PM	Bypass valve closed
9/6/2011	9:45:25 PM	Bubbler valve closed
9/6/2011	9:45:25 PM	Helium valve opened
9/6/2011	9:45:25 PM	Main Vac valve opened
9/6/2011	9:45:25 PM	Helium MFC set to  20.000000
9/6/2011	9:45:25 PM	H2 MFC set to  0.000000
9/6/2011	9:45:25 PM	BCl3 MFC set to  0.000000
9/6/2011	9:45:25 PM	PHl3 MFC set to  0.000000
9/6/2011	9:45:25 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:45:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:45:25 PM	Tube furnace set to 150
9/6/2011	9:45:55 PM	Helium valve closed
9/6/2011	9:45:55 PM	H2 valve closed
9/6/2011	9:45:55 PM	BCl3 valve closed
9/6/2011	9:45:55 PM	PH3 valve closed
9/6/2011	9:45:55 PM	SiCl4 pre valve closed
9/6/2011	9:45:55 PM	SiCl4 post valve closed
9/6/2011	9:45:55 PM	Bypass valve closed
9/6/2011	9:45:55 PM	Bubbler valve closed
9/6/2011	9:45:55 PM	Main Vac valve opened
9/6/2011	9:45:55 PM	Helium MFC set to  0.000000
9/6/2011	9:45:55 PM	H2 MFC set to  0.000000
9/6/2011	9:45:55 PM	BCl3 MFC set to  0.000000
9/6/2011	9:45:55 PM	PHl3 MFC set to  0.000000
9/6/2011	9:45:55 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:45:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:45:55 PM	Tube furnace set to 150
9/6/2011	9:46:25 PM	H2 valve closed
9/6/2011	9:46:25 PM	BCl3 valve closed
9/6/2011	9:46:25 PM	PH3 valve closed
9/6/2011	9:46:25 PM	SiCl4 pre valve closed
9/6/2011	9:46:25 PM	SiCl4 post valve closed
9/6/2011	9:46:25 PM	Bypass valve closed
9/6/2011	9:46:25 PM	Bubbler valve closed
9/6/2011	9:46:25 PM	Helium valve opened
9/6/2011	9:46:25 PM	Main Vac valve opened
9/6/2011	9:46:25 PM	Helium MFC set to  20.000000
9/6/2011	9:46:25 PM	H2 MFC set to  0.000000
9/6/2011	9:46:25 PM	BCl3 MFC set to  0.000000
9/6/2011	9:46:25 PM	PHl3 MFC set to  0.000000
9/6/2011	9:46:25 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:46:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:46:26 PM	Tube furnace set to 150
9/6/2011	9:46:56 PM	Helium valve closed
9/6/2011	9:46:56 PM	H2 valve closed
9/6/2011	9:46:56 PM	BCl3 valve closed
9/6/2011	9:46:56 PM	PH3 valve closed
9/6/2011	9:46:56 PM	SiCl4 pre valve closed
9/6/2011	9:46:56 PM	SiCl4 post valve closed
9/6/2011	9:46:56 PM	Bypass valve closed
9/6/2011	9:46:56 PM	Bubbler valve closed
9/6/2011	9:46:56 PM	Main Vac valve opened
9/6/2011	9:46:56 PM	Helium MFC set to  0.000000
9/6/2011	9:46:56 PM	H2 MFC set to  0.000000
9/6/2011	9:46:56 PM	BCl3 MFC set to  0.000000
9/6/2011	9:46:56 PM	PHl3 MFC set to  0.000000
9/6/2011	9:46:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:46:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:46:56 PM	Tube furnace set to 150
9/6/2011	9:47:26 PM	H2 valve closed
9/6/2011	9:47:26 PM	BCl3 valve closed
9/6/2011	9:47:26 PM	PH3 valve closed
9/6/2011	9:47:26 PM	SiCl4 pre valve closed
9/6/2011	9:47:26 PM	SiCl4 post valve closed
9/6/2011	9:47:26 PM	Bypass valve closed
9/6/2011	9:47:26 PM	Bubbler valve closed
9/6/2011	9:47:26 PM	Helium valve opened
9/6/2011	9:47:26 PM	Main Vac valve opened
9/6/2011	9:47:26 PM	Helium MFC set to  20.000000
9/6/2011	9:47:26 PM	H2 MFC set to  0.000000
9/6/2011	9:47:26 PM	BCl3 MFC set to  0.000000
9/6/2011	9:47:26 PM	PHl3 MFC set to  0.000000
9/6/2011	9:47:26 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:47:26 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:47:26 PM	Tube furnace set to 150
9/6/2011	9:47:56 PM	Helium valve closed
9/6/2011	9:47:56 PM	H2 valve closed
9/6/2011	9:47:56 PM	BCl3 valve closed
9/6/2011	9:47:56 PM	PH3 valve closed
9/6/2011	9:47:56 PM	SiCl4 pre valve closed
9/6/2011	9:47:56 PM	SiCl4 post valve closed
9/6/2011	9:47:56 PM	Bypass valve closed
9/6/2011	9:47:56 PM	Bubbler valve closed
9/6/2011	9:47:56 PM	Main Vac valve opened
9/6/2011	9:47:56 PM	Helium MFC set to  0.000000
9/6/2011	9:47:56 PM	H2 MFC set to  0.000000
9/6/2011	9:47:56 PM	BCl3 MFC set to  0.000000
9/6/2011	9:47:56 PM	PHl3 MFC set to  0.000000
9/6/2011	9:47:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:47:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:47:56 PM	Tube furnace set to 150
9/6/2011	9:47:57 PM	Run finished at 9:47 PM
9/6/2011	9:50:17 PM	Recipe started at 9:50 PM
9/6/2011	9:50:17 PM	Helium valve closed
9/6/2011	9:50:17 PM	H2 valve closed
9/6/2011	9:50:17 PM	BCl3 valve closed
9/6/2011	9:50:17 PM	PH3 valve closed
9/6/2011	9:50:17 PM	SiCl4 pre valve closed
9/6/2011	9:50:17 PM	SiCl4 post valve closed
9/6/2011	9:50:17 PM	Main Vac valve closed
9/6/2011	9:50:17 PM	Bypass valve closed
9/6/2011	9:50:17 PM	Bubbler valve closed
9/6/2011	9:50:17 PM	Helium MFC set to  0.000000
9/6/2011	9:50:17 PM	H2 MFC set to  0.000000
9/6/2011	9:50:17 PM	BCl3 MFC set to  0.000000
9/6/2011	9:50:17 PM	PHl3 MFC set to  0.000000
9/6/2011	9:50:17 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:50:17 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:50:17 PM	Tube furnace set to 0
9/6/2011	9:50:20 PM	Helium valve closed
9/6/2011	9:50:20 PM	BCl3 valve closed
9/6/2011	9:50:20 PM	PH3 valve closed
9/6/2011	9:50:20 PM	SiCl4 pre valve closed
9/6/2011	9:50:20 PM	SiCl4 post valve closed
9/6/2011	9:50:20 PM	Main Vac valve closed
9/6/2011	9:50:20 PM	Bypass valve closed
9/6/2011	9:50:20 PM	Bubbler valve closed
9/6/2011	9:50:20 PM	H2 valve opened
9/6/2011	9:50:20 PM	Helium MFC set to  0.000000
9/6/2011	9:50:20 PM	H2 MFC set to  500.000000
9/6/2011	9:50:20 PM	BCl3 MFC set to  0.000000
9/6/2011	9:50:20 PM	PHl3 MFC set to  0.000000
9/6/2011	9:50:20 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:50:20 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:50:20 PM	Tube furnace set to 0
9/6/2011	9:51:23 PM	Helium valve closed
9/6/2011	9:51:23 PM	BCl3 valve closed
9/6/2011	9:51:23 PM	PH3 valve closed
9/6/2011	9:51:23 PM	SiCl4 pre valve closed
9/6/2011	9:51:23 PM	SiCl4 post valve closed
9/6/2011	9:51:23 PM	Main Vac valve closed
9/6/2011	9:51:23 PM	Bypass valve closed
9/6/2011	9:51:23 PM	H2 valve opened
9/6/2011	9:51:23 PM	Bubbler valve opened
9/6/2011	9:51:23 PM	Helium MFC set to  0.000000
9/6/2011	9:51:23 PM	H2 MFC set to  500.000000
9/6/2011	9:51:23 PM	BCl3 MFC set to  0.000000
9/6/2011	9:51:23 PM	PHl3 MFC set to  0.000000
9/6/2011	9:51:23 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:51:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:51:23 PM	Tube furnace set to 0
9/6/2011	9:51:24 PM	Helium valve closed
9/6/2011	9:51:24 PM	BCl3 valve closed
9/6/2011	9:51:24 PM	PH3 valve closed
9/6/2011	9:51:24 PM	SiCl4 pre valve closed
9/6/2011	9:51:24 PM	SiCl4 post valve closed
9/6/2011	9:51:24 PM	Main Vac valve closed
9/6/2011	9:51:24 PM	Bypass valve closed
9/6/2011	9:51:24 PM	H2 valve opened
9/6/2011	9:51:24 PM	Bubbler valve opened
9/6/2011	9:51:24 PM	Helium MFC set to  0.000000
9/6/2011	9:51:24 PM	H2 MFC set to  500.000000
9/6/2011	9:51:24 PM	BCl3 MFC set to  0.000000
9/6/2011	9:51:24 PM	PHl3 MFC set to  0.000000
9/6/2011	9:51:24 PM	SiCl4 MFC set to  0.000000
9/6/2011	9:51:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	9:51:24 PM	Tube furnace set to 1000
9/6/2011	10:11:24 PM	Helium valve closed
9/6/2011	10:11:24 PM	PH3 valve closed
9/6/2011	10:11:24 PM	Main Vac valve closed
9/6/2011	10:11:24 PM	Bypass valve closed
9/6/2011	10:11:24 PM	H2 valve opened
9/6/2011	10:11:24 PM	BCl3 valve opened
9/6/2011	10:11:24 PM	SiCl4 pre valve opened
9/6/2011	10:11:24 PM	SiCl4 post valve opened
9/6/2011	10:11:24 PM	Bubbler valve opened
9/6/2011	10:11:24 PM	Helium MFC set to  0.000000
9/6/2011	10:11:24 PM	H2 MFC set to  500.000000
9/6/2011	10:11:24 PM	BCl3 MFC set to  2.000000
9/6/2011	10:11:24 PM	PHl3 MFC set to  0.000000
9/6/2011	10:11:24 PM	SiCl4 MFC set to  50.000000
9/6/2011	10:11:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:11:24 PM	Tube furnace set to 1000
9/6/2011	10:28:04 PM	Helium valve closed
9/6/2011	10:28:04 PM	BCl3 valve closed
9/6/2011	10:28:04 PM	PH3 valve closed
9/6/2011	10:28:04 PM	SiCl4 pre valve closed
9/6/2011	10:28:04 PM	SiCl4 post valve closed
9/6/2011	10:28:04 PM	Main Vac valve closed
9/6/2011	10:28:04 PM	Bypass valve closed
9/6/2011	10:28:04 PM	H2 valve opened
9/6/2011	10:28:04 PM	Bubbler valve opened
9/6/2011	10:28:04 PM	Helium MFC set to  0.000000
9/6/2011	10:28:04 PM	H2 MFC set to  500.000000
9/6/2011	10:28:04 PM	BCl3 MFC set to  0.000000
9/6/2011	10:28:04 PM	PHl3 MFC set to  0.000000
9/6/2011	10:28:04 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:28:04 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:28:04 PM	Tube furnace set to 750
9/6/2011	10:33:04 PM	H2 valve closed
9/6/2011	10:33:04 PM	BCl3 valve closed
9/6/2011	10:33:04 PM	PH3 valve closed
9/6/2011	10:33:04 PM	SiCl4 pre valve closed
9/6/2011	10:33:04 PM	SiCl4 post valve closed
9/6/2011	10:33:04 PM	Main Vac valve closed
9/6/2011	10:33:04 PM	Bypass valve closed
9/6/2011	10:33:04 PM	Helium valve opened
9/6/2011	10:33:04 PM	Bubbler valve opened
9/6/2011	10:33:04 PM	Helium MFC set to  500.000000
9/6/2011	10:33:04 PM	H2 MFC set to  0.000000
9/6/2011	10:33:04 PM	BCl3 MFC set to  0.000000
9/6/2011	10:33:04 PM	PHl3 MFC set to  0.000000
9/6/2011	10:33:04 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:33:04 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:33:05 PM	Tube furnace set to 0
9/6/2011	10:42:45 PM	Run aborted at 10:42 PM
9/6/2011	10:42:45 PM	Helium valve closed
9/6/2011	10:42:45 PM	H2 valve closed
9/6/2011	10:42:45 PM	BCl3 valve closed
9/6/2011	10:42:45 PM	PH3 valve closed
9/6/2011	10:42:45 PM	SiCl4 pre valve closed
9/6/2011	10:42:45 PM	SiCl4 post valve closed
9/6/2011	10:42:45 PM	Bypass valve closed
9/6/2011	10:42:45 PM	Main Vac valve closed
9/6/2011	10:42:45 PM	Bubbler valve closed
9/6/2011	10:42:45 PM	Helium MFC set to  0.000000
9/6/2011	10:42:45 PM	H2 MFC set to  0.000000
9/6/2011	10:42:45 PM	BCl3 MFC set to  0.000000
9/6/2011	10:42:45 PM	PHl3 MFC set to  0.000000
9/6/2011	10:42:45 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:42:45 PM	Tube furnace set to 0
9/6/2011	10:44:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	10:44:59 PM	Recipe started at 10:44 PM
9/6/2011	10:44:59 PM	Helium valve closed
9/6/2011	10:44:59 PM	H2 valve closed
9/6/2011	10:44:59 PM	BCl3 valve closed
9/6/2011	10:44:59 PM	PH3 valve closed
9/6/2011	10:44:59 PM	SiCl4 pre valve closed
9/6/2011	10:44:59 PM	SiCl4 post valve closed
9/6/2011	10:44:59 PM	Main Vac valve closed
9/6/2011	10:44:59 PM	Bubbler valve closed
9/6/2011	10:44:59 PM	Bypass valve opened
9/6/2011	10:44:59 PM	Helium MFC set to  0.000000
9/6/2011	10:44:59 PM	H2 MFC set to  0.000000
9/6/2011	10:44:59 PM	BCl3 MFC set to  0.000000
9/6/2011	10:44:59 PM	PHl3 MFC set to  0.000000
9/6/2011	10:44:59 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:44:59 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:45:00 PM	Tube furnace set to 0
9/6/2011	10:45:56 PM	Helium valve closed
9/6/2011	10:45:56 PM	H2 valve closed
9/6/2011	10:45:56 PM	BCl3 valve closed
9/6/2011	10:45:56 PM	PH3 valve closed
9/6/2011	10:45:56 PM	SiCl4 pre valve closed
9/6/2011	10:45:56 PM	SiCl4 post valve closed
9/6/2011	10:45:56 PM	Main Vac valve closed
9/6/2011	10:45:56 PM	Bubbler valve closed
9/6/2011	10:45:56 PM	Bypass valve opened
9/6/2011	10:45:56 PM	Helium MFC set to  0.000000
9/6/2011	10:45:56 PM	H2 MFC set to  0.000000
9/6/2011	10:45:56 PM	BCl3 MFC set to  0.000000
9/6/2011	10:45:56 PM	PHl3 MFC set to  0.000000
9/6/2011	10:45:56 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:45:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:45:57 PM	Tube furnace set to 0
9/6/2011	10:46:57 PM	Helium valve closed
9/6/2011	10:46:57 PM	H2 valve closed
9/6/2011	10:46:57 PM	BCl3 valve closed
9/6/2011	10:46:57 PM	PH3 valve closed
9/6/2011	10:46:57 PM	SiCl4 pre valve closed
9/6/2011	10:46:57 PM	SiCl4 post valve closed
9/6/2011	10:46:57 PM	Bypass valve closed
9/6/2011	10:46:57 PM	Bubbler valve closed
9/6/2011	10:46:57 PM	Main Vac valve opened
9/6/2011	10:46:57 PM	Helium MFC set to  0.000000
9/6/2011	10:46:57 PM	H2 MFC set to  0.000000
9/6/2011	10:46:57 PM	BCl3 MFC set to  0.000000
9/6/2011	10:46:57 PM	PHl3 MFC set to  0.000000
9/6/2011	10:46:57 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:46:57 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:46:57 PM	Tube furnace set to 0
9/6/2011	10:46:58 PM	Run finished at 10:46 PM
9/6/2011	10:46:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	10:47:58 PM	Recipe started at 10:47 PM
9/6/2011	10:47:58 PM	Helium valve closed
9/6/2011	10:47:58 PM	H2 valve closed
9/6/2011	10:47:58 PM	BCl3 valve closed
9/6/2011	10:47:58 PM	PH3 valve closed
9/6/2011	10:47:58 PM	SiCl4 pre valve closed
9/6/2011	10:47:58 PM	SiCl4 post valve closed
9/6/2011	10:47:58 PM	Bypass valve closed
9/6/2011	10:47:58 PM	Bubbler valve closed
9/6/2011	10:47:58 PM	Main Vac valve opened
9/6/2011	10:47:58 PM	Helium MFC set to  0.000000
9/6/2011	10:47:58 PM	H2 MFC set to  0.000000
9/6/2011	10:47:58 PM	BCl3 MFC set to  0.000000
9/6/2011	10:47:58 PM	PHl3 MFC set to  0.000000
9/6/2011	10:47:58 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:47:58 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:47:58 PM	Tube furnace set to 150
9/6/2011	10:48:28 PM	H2 valve closed
9/6/2011	10:48:28 PM	BCl3 valve closed
9/6/2011	10:48:28 PM	PH3 valve closed
9/6/2011	10:48:28 PM	SiCl4 pre valve closed
9/6/2011	10:48:28 PM	SiCl4 post valve closed
9/6/2011	10:48:28 PM	Bypass valve closed
9/6/2011	10:48:28 PM	Bubbler valve closed
9/6/2011	10:48:28 PM	Helium valve opened
9/6/2011	10:48:28 PM	Main Vac valve opened
9/6/2011	10:48:28 PM	Helium MFC set to  20.000000
9/6/2011	10:48:28 PM	H2 MFC set to  0.000000
9/6/2011	10:48:29 PM	BCl3 MFC set to  0.000000
9/6/2011	10:48:29 PM	PHl3 MFC set to  0.000000
9/6/2011	10:48:29 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:48:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:48:29 PM	Tube furnace set to 150
9/6/2011	10:48:59 PM	Helium valve closed
9/6/2011	10:48:59 PM	H2 valve closed
9/6/2011	10:48:59 PM	BCl3 valve closed
9/6/2011	10:48:59 PM	PH3 valve closed
9/6/2011	10:48:59 PM	SiCl4 pre valve closed
9/6/2011	10:48:59 PM	SiCl4 post valve closed
9/6/2011	10:48:59 PM	Bypass valve closed
9/6/2011	10:48:59 PM	Bubbler valve closed
9/6/2011	10:48:59 PM	Main Vac valve opened
9/6/2011	10:48:59 PM	Helium MFC set to  0.000000
9/6/2011	10:48:59 PM	H2 MFC set to  0.000000
9/6/2011	10:48:59 PM	BCl3 MFC set to  0.000000
9/6/2011	10:48:59 PM	PHl3 MFC set to  0.000000
9/6/2011	10:48:59 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:48:59 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:48:59 PM	Tube furnace set to 150
9/6/2011	10:49:29 PM	H2 valve closed
9/6/2011	10:49:29 PM	BCl3 valve closed
9/6/2011	10:49:29 PM	PH3 valve closed
9/6/2011	10:49:29 PM	SiCl4 pre valve closed
9/6/2011	10:49:29 PM	SiCl4 post valve closed
9/6/2011	10:49:29 PM	Bypass valve closed
9/6/2011	10:49:29 PM	Bubbler valve closed
9/6/2011	10:49:29 PM	Helium valve opened
9/6/2011	10:49:29 PM	Main Vac valve opened
9/6/2011	10:49:29 PM	Helium MFC set to  20.000000
9/6/2011	10:49:29 PM	H2 MFC set to  0.000000
9/6/2011	10:49:29 PM	BCl3 MFC set to  0.000000
9/6/2011	10:49:29 PM	PHl3 MFC set to  0.000000
9/6/2011	10:49:29 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:49:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:49:29 PM	Tube furnace set to 150
9/6/2011	10:49:59 PM	Helium valve closed
9/6/2011	10:49:59 PM	H2 valve closed
9/6/2011	10:49:59 PM	BCl3 valve closed
9/6/2011	10:49:59 PM	PH3 valve closed
9/6/2011	10:49:59 PM	SiCl4 pre valve closed
9/6/2011	10:49:59 PM	SiCl4 post valve closed
9/6/2011	10:49:59 PM	Bypass valve closed
9/6/2011	10:49:59 PM	Bubbler valve closed
9/6/2011	10:49:59 PM	Main Vac valve opened
9/6/2011	10:49:59 PM	Helium MFC set to  0.000000
9/6/2011	10:49:59 PM	H2 MFC set to  0.000000
9/6/2011	10:49:59 PM	BCl3 MFC set to  0.000000
9/6/2011	10:49:59 PM	PHl3 MFC set to  0.000000
9/6/2011	10:49:59 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:49:59 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:49:59 PM	Tube furnace set to 150
9/6/2011	10:50:29 PM	H2 valve closed
9/6/2011	10:50:29 PM	BCl3 valve closed
9/6/2011	10:50:29 PM	PH3 valve closed
9/6/2011	10:50:29 PM	SiCl4 pre valve closed
9/6/2011	10:50:29 PM	SiCl4 post valve closed
9/6/2011	10:50:29 PM	Bypass valve closed
9/6/2011	10:50:29 PM	Bubbler valve closed
9/6/2011	10:50:29 PM	Helium valve opened
9/6/2011	10:50:29 PM	Main Vac valve opened
9/6/2011	10:50:29 PM	Helium MFC set to  20.000000
9/6/2011	10:50:29 PM	H2 MFC set to  0.000000
9/6/2011	10:50:29 PM	BCl3 MFC set to  0.000000
9/6/2011	10:50:29 PM	PHl3 MFC set to  0.000000
9/6/2011	10:50:29 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:50:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:50:30 PM	Tube furnace set to 150
9/6/2011	10:51:00 PM	Helium valve closed
9/6/2011	10:51:00 PM	H2 valve closed
9/6/2011	10:51:00 PM	BCl3 valve closed
9/6/2011	10:51:00 PM	PH3 valve closed
9/6/2011	10:51:00 PM	SiCl4 pre valve closed
9/6/2011	10:51:00 PM	SiCl4 post valve closed
9/6/2011	10:51:00 PM	Bypass valve closed
9/6/2011	10:51:00 PM	Bubbler valve closed
9/6/2011	10:51:00 PM	Main Vac valve opened
9/6/2011	10:51:00 PM	Helium MFC set to  0.000000
9/6/2011	10:51:00 PM	H2 MFC set to  0.000000
9/6/2011	10:51:00 PM	BCl3 MFC set to  0.000000
9/6/2011	10:51:00 PM	PHl3 MFC set to  0.000000
9/6/2011	10:51:00 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:51:00 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:51:00 PM	Tube furnace set to 150
9/6/2011	10:51:30 PM	H2 valve closed
9/6/2011	10:51:30 PM	BCl3 valve closed
9/6/2011	10:51:30 PM	PH3 valve closed
9/6/2011	10:51:30 PM	SiCl4 pre valve closed
9/6/2011	10:51:30 PM	SiCl4 post valve closed
9/6/2011	10:51:30 PM	Bypass valve closed
9/6/2011	10:51:30 PM	Bubbler valve closed
9/6/2011	10:51:30 PM	Helium valve opened
9/6/2011	10:51:30 PM	Main Vac valve opened
9/6/2011	10:51:30 PM	Helium MFC set to  20.000000
9/6/2011	10:51:30 PM	H2 MFC set to  0.000000
9/6/2011	10:51:30 PM	BCl3 MFC set to  0.000000
9/6/2011	10:51:30 PM	PHl3 MFC set to  0.000000
9/6/2011	10:51:30 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:51:30 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:51:30 PM	Tube furnace set to 150
9/6/2011	10:52:00 PM	Helium valve closed
9/6/2011	10:52:00 PM	H2 valve closed
9/6/2011	10:52:00 PM	BCl3 valve closed
9/6/2011	10:52:00 PM	PH3 valve closed
9/6/2011	10:52:00 PM	SiCl4 pre valve closed
9/6/2011	10:52:00 PM	SiCl4 post valve closed
9/6/2011	10:52:00 PM	Bypass valve closed
9/6/2011	10:52:00 PM	Bubbler valve closed
9/6/2011	10:52:00 PM	Main Vac valve opened
9/6/2011	10:52:00 PM	Helium MFC set to  0.000000
9/6/2011	10:52:00 PM	H2 MFC set to  0.000000
9/6/2011	10:52:00 PM	BCl3 MFC set to  0.000000
9/6/2011	10:52:00 PM	PHl3 MFC set to  0.000000
9/6/2011	10:52:00 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:52:00 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:52:00 PM	Tube furnace set to 150
9/6/2011	10:52:30 PM	H2 valve closed
9/6/2011	10:52:30 PM	BCl3 valve closed
9/6/2011	10:52:30 PM	PH3 valve closed
9/6/2011	10:52:30 PM	SiCl4 pre valve closed
9/6/2011	10:52:30 PM	SiCl4 post valve closed
9/6/2011	10:52:30 PM	Bypass valve closed
9/6/2011	10:52:30 PM	Bubbler valve closed
9/6/2011	10:52:30 PM	Helium valve opened
9/6/2011	10:52:30 PM	Main Vac valve opened
9/6/2011	10:52:30 PM	Helium MFC set to  20.000000
9/6/2011	10:52:30 PM	H2 MFC set to  0.000000
9/6/2011	10:52:30 PM	BCl3 MFC set to  0.000000
9/6/2011	10:52:30 PM	PHl3 MFC set to  0.000000
9/6/2011	10:52:30 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:52:30 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:52:30 PM	Tube furnace set to 150
9/6/2011	10:53:00 PM	Helium valve closed
9/6/2011	10:53:00 PM	H2 valve closed
9/6/2011	10:53:00 PM	BCl3 valve closed
9/6/2011	10:53:00 PM	PH3 valve closed
9/6/2011	10:53:00 PM	SiCl4 pre valve closed
9/6/2011	10:53:00 PM	SiCl4 post valve closed
9/6/2011	10:53:00 PM	Bypass valve closed
9/6/2011	10:53:00 PM	Bubbler valve closed
9/6/2011	10:53:00 PM	Main Vac valve opened
9/6/2011	10:53:00 PM	Helium MFC set to  0.000000
9/6/2011	10:53:00 PM	H2 MFC set to  0.000000
9/6/2011	10:53:00 PM	BCl3 MFC set to  0.000000
9/6/2011	10:53:00 PM	PHl3 MFC set to  0.000000
9/6/2011	10:53:00 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:53:00 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:53:01 PM	Tube furnace set to 150
9/6/2011	10:53:31 PM	H2 valve closed
9/6/2011	10:53:31 PM	BCl3 valve closed
9/6/2011	10:53:31 PM	PH3 valve closed
9/6/2011	10:53:31 PM	SiCl4 pre valve closed
9/6/2011	10:53:31 PM	SiCl4 post valve closed
9/6/2011	10:53:31 PM	Bypass valve closed
9/6/2011	10:53:31 PM	Bubbler valve closed
9/6/2011	10:53:31 PM	Helium valve opened
9/6/2011	10:53:31 PM	Main Vac valve opened
9/6/2011	10:53:31 PM	Helium MFC set to  20.000000
9/6/2011	10:53:31 PM	H2 MFC set to  0.000000
9/6/2011	10:53:31 PM	BCl3 MFC set to  0.000000
9/6/2011	10:53:31 PM	PHl3 MFC set to  0.000000
9/6/2011	10:53:31 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:53:31 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:53:31 PM	Tube furnace set to 150
9/6/2011	10:54:01 PM	Helium valve closed
9/6/2011	10:54:01 PM	H2 valve closed
9/6/2011	10:54:01 PM	BCl3 valve closed
9/6/2011	10:54:01 PM	PH3 valve closed
9/6/2011	10:54:01 PM	SiCl4 pre valve closed
9/6/2011	10:54:01 PM	SiCl4 post valve closed
9/6/2011	10:54:01 PM	Bypass valve closed
9/6/2011	10:54:01 PM	Bubbler valve closed
9/6/2011	10:54:01 PM	Main Vac valve opened
9/6/2011	10:54:01 PM	Helium MFC set to  0.000000
9/6/2011	10:54:01 PM	H2 MFC set to  0.000000
9/6/2011	10:54:01 PM	BCl3 MFC set to  0.000000
9/6/2011	10:54:01 PM	PHl3 MFC set to  0.000000
9/6/2011	10:54:01 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:54:01 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:54:01 PM	Tube furnace set to 150
9/6/2011	10:54:31 PM	H2 valve closed
9/6/2011	10:54:31 PM	BCl3 valve closed
9/6/2011	10:54:31 PM	PH3 valve closed
9/6/2011	10:54:31 PM	SiCl4 pre valve closed
9/6/2011	10:54:31 PM	SiCl4 post valve closed
9/6/2011	10:54:31 PM	Bypass valve closed
9/6/2011	10:54:31 PM	Bubbler valve closed
9/6/2011	10:54:31 PM	Helium valve opened
9/6/2011	10:54:31 PM	Main Vac valve opened
9/6/2011	10:54:31 PM	Helium MFC set to  20.000000
9/6/2011	10:54:31 PM	H2 MFC set to  0.000000
9/6/2011	10:54:31 PM	BCl3 MFC set to  0.000000
9/6/2011	10:54:31 PM	PHl3 MFC set to  0.000000
9/6/2011	10:54:31 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:54:31 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:54:31 PM	Tube furnace set to 150
9/6/2011	10:55:01 PM	Helium valve closed
9/6/2011	10:55:01 PM	H2 valve closed
9/6/2011	10:55:01 PM	BCl3 valve closed
9/6/2011	10:55:01 PM	PH3 valve closed
9/6/2011	10:55:01 PM	SiCl4 pre valve closed
9/6/2011	10:55:01 PM	SiCl4 post valve closed
9/6/2011	10:55:01 PM	Bypass valve closed
9/6/2011	10:55:01 PM	Bubbler valve closed
9/6/2011	10:55:01 PM	Main Vac valve opened
9/6/2011	10:55:01 PM	Helium MFC set to  0.000000
9/6/2011	10:55:01 PM	H2 MFC set to  0.000000
9/6/2011	10:55:01 PM	BCl3 MFC set to  0.000000
9/6/2011	10:55:01 PM	PHl3 MFC set to  0.000000
9/6/2011	10:55:01 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:55:01 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:55:01 PM	Tube furnace set to 150
9/6/2011	10:55:31 PM	H2 valve closed
9/6/2011	10:55:31 PM	BCl3 valve closed
9/6/2011	10:55:31 PM	PH3 valve closed
9/6/2011	10:55:31 PM	SiCl4 pre valve closed
9/6/2011	10:55:31 PM	SiCl4 post valve closed
9/6/2011	10:55:31 PM	Bypass valve closed
9/6/2011	10:55:31 PM	Bubbler valve closed
9/6/2011	10:55:31 PM	Helium valve opened
9/6/2011	10:55:31 PM	Main Vac valve opened
9/6/2011	10:55:31 PM	Helium MFC set to  20.000000
9/6/2011	10:55:32 PM	H2 MFC set to  0.000000
9/6/2011	10:55:32 PM	BCl3 MFC set to  0.000000
9/6/2011	10:55:32 PM	PHl3 MFC set to  0.000000
9/6/2011	10:55:32 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:55:32 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:55:32 PM	Tube furnace set to 150
9/6/2011	10:56:02 PM	Helium valve closed
9/6/2011	10:56:02 PM	H2 valve closed
9/6/2011	10:56:02 PM	BCl3 valve closed
9/6/2011	10:56:02 PM	PH3 valve closed
9/6/2011	10:56:02 PM	SiCl4 pre valve closed
9/6/2011	10:56:02 PM	SiCl4 post valve closed
9/6/2011	10:56:02 PM	Bypass valve closed
9/6/2011	10:56:02 PM	Bubbler valve closed
9/6/2011	10:56:02 PM	Main Vac valve opened
9/6/2011	10:56:02 PM	Helium MFC set to  0.000000
9/6/2011	10:56:02 PM	H2 MFC set to  0.000000
9/6/2011	10:56:02 PM	BCl3 MFC set to  0.000000
9/6/2011	10:56:02 PM	PHl3 MFC set to  0.000000
9/6/2011	10:56:02 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:56:02 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:56:02 PM	Tube furnace set to 150
9/6/2011	10:56:32 PM	H2 valve closed
9/6/2011	10:56:32 PM	BCl3 valve closed
9/6/2011	10:56:32 PM	PH3 valve closed
9/6/2011	10:56:32 PM	SiCl4 pre valve closed
9/6/2011	10:56:32 PM	SiCl4 post valve closed
9/6/2011	10:56:32 PM	Bypass valve closed
9/6/2011	10:56:32 PM	Bubbler valve closed
9/6/2011	10:56:32 PM	Helium valve opened
9/6/2011	10:56:32 PM	Main Vac valve opened
9/6/2011	10:56:32 PM	Helium MFC set to  20.000000
9/6/2011	10:56:32 PM	H2 MFC set to  0.000000
9/6/2011	10:56:32 PM	BCl3 MFC set to  0.000000
9/6/2011	10:56:32 PM	PHl3 MFC set to  0.000000
9/6/2011	10:56:32 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:56:32 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:56:32 PM	Tube furnace set to 150
9/6/2011	10:57:02 PM	Helium valve closed
9/6/2011	10:57:02 PM	H2 valve closed
9/6/2011	10:57:02 PM	BCl3 valve closed
9/6/2011	10:57:02 PM	PH3 valve closed
9/6/2011	10:57:02 PM	SiCl4 pre valve closed
9/6/2011	10:57:02 PM	SiCl4 post valve closed
9/6/2011	10:57:02 PM	Bypass valve closed
9/6/2011	10:57:02 PM	Bubbler valve closed
9/6/2011	10:57:02 PM	Main Vac valve opened
9/6/2011	10:57:02 PM	Helium MFC set to  0.000000
9/6/2011	10:57:02 PM	H2 MFC set to  0.000000
9/6/2011	10:57:02 PM	BCl3 MFC set to  0.000000
9/6/2011	10:57:02 PM	PHl3 MFC set to  0.000000
9/6/2011	10:57:02 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:57:02 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:57:02 PM	Tube furnace set to 150
9/6/2011	10:57:32 PM	H2 valve closed
9/6/2011	10:57:32 PM	BCl3 valve closed
9/6/2011	10:57:32 PM	PH3 valve closed
9/6/2011	10:57:32 PM	SiCl4 pre valve closed
9/6/2011	10:57:32 PM	SiCl4 post valve closed
9/6/2011	10:57:32 PM	Bypass valve closed
9/6/2011	10:57:32 PM	Bubbler valve closed
9/6/2011	10:57:32 PM	Helium valve opened
9/6/2011	10:57:32 PM	Main Vac valve opened
9/6/2011	10:57:32 PM	Helium MFC set to  20.000000
9/6/2011	10:57:32 PM	H2 MFC set to  0.000000
9/6/2011	10:57:32 PM	BCl3 MFC set to  0.000000
9/6/2011	10:57:32 PM	PHl3 MFC set to  0.000000
9/6/2011	10:57:32 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:57:32 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:57:33 PM	Tube furnace set to 150
9/6/2011	10:58:03 PM	Helium valve closed
9/6/2011	10:58:03 PM	H2 valve closed
9/6/2011	10:58:03 PM	BCl3 valve closed
9/6/2011	10:58:03 PM	PH3 valve closed
9/6/2011	10:58:03 PM	SiCl4 pre valve closed
9/6/2011	10:58:03 PM	SiCl4 post valve closed
9/6/2011	10:58:03 PM	Bypass valve closed
9/6/2011	10:58:03 PM	Bubbler valve closed
9/6/2011	10:58:03 PM	Main Vac valve opened
9/6/2011	10:58:03 PM	Helium MFC set to  0.000000
9/6/2011	10:58:03 PM	H2 MFC set to  0.000000
9/6/2011	10:58:03 PM	BCl3 MFC set to  0.000000
9/6/2011	10:58:03 PM	PHl3 MFC set to  0.000000
9/6/2011	10:58:03 PM	SiCl4 MFC set to  0.000000
9/6/2011	10:58:03 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	10:58:03 PM	Tube furnace set to 150
9/6/2011	10:58:04 PM	Run finished at 10:58 PM
9/6/2011	10:59:24 PM	Main Vac valve closed
9/6/2011	10:59:28 PM	Main Vac valve opened
9/6/2011	11:00:22 PM	Main Vac valve closed
9/6/2011	11:00:30 PM	Main Vac valve opened
9/6/2011	11:01:48 PM	Recipe started at 11:01 PM
9/6/2011	11:01:48 PM	Helium valve closed
9/6/2011	11:01:48 PM	H2 valve closed
9/6/2011	11:01:48 PM	BCl3 valve closed
9/6/2011	11:01:48 PM	PH3 valve closed
9/6/2011	11:01:48 PM	SiCl4 pre valve closed
9/6/2011	11:01:48 PM	SiCl4 post valve closed
9/6/2011	11:01:48 PM	Main Vac valve closed
9/6/2011	11:01:48 PM	Bypass valve closed
9/6/2011	11:01:48 PM	Bubbler valve closed
9/6/2011	11:01:48 PM	Helium MFC set to  0.000000
9/6/2011	11:01:48 PM	H2 MFC set to  0.000000
9/6/2011	11:01:48 PM	BCl3 MFC set to  0.000000
9/6/2011	11:01:48 PM	PHl3 MFC set to  0.000000
9/6/2011	11:01:48 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:01:48 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:01:48 PM	Tube furnace set to 0
9/6/2011	11:01:51 PM	Helium valve closed
9/6/2011	11:01:51 PM	BCl3 valve closed
9/6/2011	11:01:51 PM	PH3 valve closed
9/6/2011	11:01:51 PM	SiCl4 pre valve closed
9/6/2011	11:01:51 PM	SiCl4 post valve closed
9/6/2011	11:01:51 PM	Main Vac valve closed
9/6/2011	11:01:51 PM	Bypass valve closed
9/6/2011	11:01:51 PM	Bubbler valve closed
9/6/2011	11:01:51 PM	H2 valve opened
9/6/2011	11:01:51 PM	Helium MFC set to  0.000000
9/6/2011	11:01:51 PM	H2 MFC set to  500.000000
9/6/2011	11:01:51 PM	BCl3 MFC set to  0.000000
9/6/2011	11:01:51 PM	PHl3 MFC set to  0.000000
9/6/2011	11:01:51 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:01:51 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:01:51 PM	Tube furnace set to 0
9/6/2011	11:02:52 PM	Helium valve closed
9/6/2011	11:02:52 PM	BCl3 valve closed
9/6/2011	11:02:52 PM	PH3 valve closed
9/6/2011	11:02:52 PM	SiCl4 pre valve closed
9/6/2011	11:02:52 PM	SiCl4 post valve closed
9/6/2011	11:02:52 PM	Main Vac valve closed
9/6/2011	11:02:52 PM	Bypass valve closed
9/6/2011	11:02:52 PM	H2 valve opened
9/6/2011	11:02:52 PM	Bubbler valve opened
9/6/2011	11:02:52 PM	Helium MFC set to  0.000000
9/6/2011	11:02:52 PM	H2 MFC set to  500.000000
9/6/2011	11:02:52 PM	BCl3 MFC set to  0.000000
9/6/2011	11:02:52 PM	PHl3 MFC set to  0.000000
9/6/2011	11:02:52 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:02:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:02:52 PM	Tube furnace set to 0
9/6/2011	11:02:53 PM	Helium valve closed
9/6/2011	11:02:53 PM	BCl3 valve closed
9/6/2011	11:02:53 PM	PH3 valve closed
9/6/2011	11:02:53 PM	SiCl4 pre valve closed
9/6/2011	11:02:53 PM	SiCl4 post valve closed
9/6/2011	11:02:53 PM	Main Vac valve closed
9/6/2011	11:02:53 PM	Bypass valve closed
9/6/2011	11:02:53 PM	H2 valve opened
9/6/2011	11:02:53 PM	Bubbler valve opened
9/6/2011	11:02:53 PM	Helium MFC set to  0.000000
9/6/2011	11:02:53 PM	H2 MFC set to  500.000000
9/6/2011	11:02:53 PM	BCl3 MFC set to  0.000000
9/6/2011	11:02:53 PM	PHl3 MFC set to  0.000000
9/6/2011	11:02:53 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:02:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:02:53 PM	Tube furnace set to 1000
9/6/2011	11:22:53 PM	Helium valve closed
9/6/2011	11:22:53 PM	PH3 valve closed
9/6/2011	11:22:53 PM	Main Vac valve closed
9/6/2011	11:22:53 PM	Bypass valve closed
9/6/2011	11:22:53 PM	H2 valve opened
9/6/2011	11:22:53 PM	BCl3 valve opened
9/6/2011	11:22:53 PM	SiCl4 pre valve opened
9/6/2011	11:22:53 PM	SiCl4 post valve opened
9/6/2011	11:22:53 PM	Bubbler valve opened
9/6/2011	11:22:53 PM	Helium MFC set to  0.000000
9/6/2011	11:22:53 PM	H2 MFC set to  500.000000
9/6/2011	11:22:53 PM	BCl3 MFC set to  2.000000
9/6/2011	11:22:53 PM	PHl3 MFC set to  0.000000
9/6/2011	11:22:53 PM	SiCl4 MFC set to  50.000000
9/6/2011	11:22:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:22:53 PM	Tube furnace set to 1000
9/6/2011	11:39:33 PM	Helium valve closed
9/6/2011	11:39:33 PM	BCl3 valve closed
9/6/2011	11:39:33 PM	PH3 valve closed
9/6/2011	11:39:33 PM	SiCl4 pre valve closed
9/6/2011	11:39:33 PM	SiCl4 post valve closed
9/6/2011	11:39:33 PM	Main Vac valve closed
9/6/2011	11:39:33 PM	Bypass valve closed
9/6/2011	11:39:33 PM	H2 valve opened
9/6/2011	11:39:33 PM	Bubbler valve opened
9/6/2011	11:39:33 PM	Helium MFC set to  0.000000
9/6/2011	11:39:33 PM	H2 MFC set to  500.000000
9/6/2011	11:39:33 PM	BCl3 MFC set to  0.000000
9/6/2011	11:39:33 PM	PHl3 MFC set to  0.000000
9/6/2011	11:39:33 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:39:33 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:39:33 PM	Tube furnace set to 750
9/6/2011	11:44:33 PM	H2 valve closed
9/6/2011	11:44:33 PM	BCl3 valve closed
9/6/2011	11:44:33 PM	PH3 valve closed
9/6/2011	11:44:33 PM	SiCl4 pre valve closed
9/6/2011	11:44:33 PM	SiCl4 post valve closed
9/6/2011	11:44:33 PM	Main Vac valve closed
9/6/2011	11:44:33 PM	Bypass valve closed
9/6/2011	11:44:33 PM	Helium valve opened
9/6/2011	11:44:33 PM	Bubbler valve opened
9/6/2011	11:44:33 PM	Helium MFC set to  500.000000
9/6/2011	11:44:33 PM	H2 MFC set to  0.000000
9/6/2011	11:44:33 PM	BCl3 MFC set to  0.000000
9/6/2011	11:44:33 PM	PHl3 MFC set to  0.000000
9/6/2011	11:44:33 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:44:33 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:44:34 PM	Tube furnace set to 0
9/6/2011	11:47:41 PM	Run aborted at 11:47 PM
9/6/2011	11:47:41 PM	Helium valve closed
9/6/2011	11:47:41 PM	H2 valve closed
9/6/2011	11:47:41 PM	BCl3 valve closed
9/6/2011	11:47:41 PM	PH3 valve closed
9/6/2011	11:47:41 PM	SiCl4 pre valve closed
9/6/2011	11:47:41 PM	SiCl4 post valve closed
9/6/2011	11:47:41 PM	Bypass valve closed
9/6/2011	11:47:41 PM	Main Vac valve closed
9/6/2011	11:47:41 PM	Bubbler valve closed
9/6/2011	11:47:41 PM	Helium MFC set to  0.000000
9/6/2011	11:47:41 PM	H2 MFC set to  0.000000
9/6/2011	11:47:41 PM	BCl3 MFC set to  0.000000
9/6/2011	11:47:41 PM	PHl3 MFC set to  0.000000
9/6/2011	11:47:41 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:47:41 PM	Tube furnace set to 0
9/6/2011	11:50:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	11:50:08 PM	Recipe started at 11:50 PM
9/6/2011	11:50:08 PM	Helium valve closed
9/6/2011	11:50:08 PM	H2 valve closed
9/6/2011	11:50:08 PM	BCl3 valve closed
9/6/2011	11:50:08 PM	PH3 valve closed
9/6/2011	11:50:08 PM	SiCl4 pre valve closed
9/6/2011	11:50:08 PM	SiCl4 post valve closed
9/6/2011	11:50:08 PM	Main Vac valve closed
9/6/2011	11:50:08 PM	Bubbler valve closed
9/6/2011	11:50:08 PM	Bypass valve opened
9/6/2011	11:50:08 PM	Helium MFC set to  0.000000
9/6/2011	11:50:08 PM	H2 MFC set to  0.000000
9/6/2011	11:50:08 PM	BCl3 MFC set to  0.000000
9/6/2011	11:50:08 PM	PHl3 MFC set to  0.000000
9/6/2011	11:50:08 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:50:08 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:50:08 PM	Tube furnace set to 0
9/6/2011	11:51:06 PM	Helium valve closed
9/6/2011	11:51:06 PM	H2 valve closed
9/6/2011	11:51:06 PM	BCl3 valve closed
9/6/2011	11:51:06 PM	PH3 valve closed
9/6/2011	11:51:06 PM	SiCl4 pre valve closed
9/6/2011	11:51:06 PM	SiCl4 post valve closed
9/6/2011	11:51:06 PM	Main Vac valve closed
9/6/2011	11:51:06 PM	Bubbler valve closed
9/6/2011	11:51:06 PM	Bypass valve opened
9/6/2011	11:51:06 PM	Helium MFC set to  0.000000
9/6/2011	11:51:06 PM	H2 MFC set to  0.000000
9/6/2011	11:51:06 PM	BCl3 MFC set to  0.000000
9/6/2011	11:51:06 PM	PHl3 MFC set to  0.000000
9/6/2011	11:51:06 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:51:06 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:51:06 PM	Tube furnace set to 0
9/6/2011	11:52:06 PM	Helium valve closed
9/6/2011	11:52:06 PM	H2 valve closed
9/6/2011	11:52:06 PM	BCl3 valve closed
9/6/2011	11:52:06 PM	PH3 valve closed
9/6/2011	11:52:06 PM	SiCl4 pre valve closed
9/6/2011	11:52:06 PM	SiCl4 post valve closed
9/6/2011	11:52:06 PM	Bypass valve closed
9/6/2011	11:52:06 PM	Bubbler valve closed
9/6/2011	11:52:06 PM	Main Vac valve opened
9/6/2011	11:52:06 PM	Helium MFC set to  0.000000
9/6/2011	11:52:06 PM	H2 MFC set to  0.000000
9/6/2011	11:52:06 PM	BCl3 MFC set to  0.000000
9/6/2011	11:52:06 PM	PHl3 MFC set to  0.000000
9/6/2011	11:52:06 PM	SiCl4 MFC set to  0.000000
9/6/2011	11:52:06 PM	Bypass solenoid MFC set to  0.000000
9/6/2011	11:52:06 PM	Tube furnace set to 0
9/6/2011	11:52:07 PM	Run finished at 11:52 PM
9/6/2011	11:52:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2011	11:53:35 PM	H2 MFC set to  30.000000
9/6/2011	11:53:45 PM	H2 valve opened
9/6/2011	11:53:53 PM	H2 MFC set to  20.000000
9/6/2011	11:54:59 PM	H2 MFC set to  15.000000
9/6/2011	11:55:22 PM	H2 MFC set to  10.000000
9/6/2011	11:55:30 PM	H2 MFC set to  12.000000
9/6/2011	11:56:03 PM	H2 valve closed
9/6/2011	11:56:27 PM	H2 valve opened
9/6/2011	11:57:26 PM	H2 valve closed
9/6/2011	11:57:53 PM	H2 valve opened
9/6/2011	11:58:07 PM	H2 MFC set to  11.000000
9/6/2011	11:58:38 PM	H2 valve closed
9/6/2011	11:59:22 PM	H2 valve opened
9/6/2011	11:59:48 PM	H2 valve closed
9/6/2011	11:59:55 PM	H2 MFC set to  0.000000
